Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object

A movable body apparatus, comprising:

• a support section that supports an object in a noncontact manner;
• a holding section that holds the object supported in a noncontact manner by the support section;
• a first drive section that moves the holding section in a first direction and a second direction intersecting each other;
• a reference member serving as a reference of movement of the holding section in the first and the second directions;
• a first measurement section having a first grating section that has a measurement component in the first direction and a first head that is disposed to face the first grating section and irradiates the first grating section with a measurement beam, the first measurement section measuring position information of the first head by the first head and the first grating section, one of the first grating section and the first head being provided at the holding section and the other of the first grating section and the first head being provided between the reference member and the holding section;
• a movable body that is movable in the second direction in a state of holding the other of the first grating section and the first head, while the holding section is moved in the second direction;
• a second measurement section that measures position information of the movable body in the second direction with respect to the reference member;
• and
• a position measurement system that obtains position information, in the first and the second directions, of the holding section that holds the object, based on the position information measured by the first and the second measurement sections.