Optical element, optical assembly and production method
AssigneeCarl Zeiss SMT GmbH
InventorsRoland Pilz, Thomas Petasch
Life of this patent
Estimating the term…
Abstract
An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.
Claims21
A method, comprising:
- forming a one-piece film;
- and
- after forming the one-piece film, connecting the one-piece film to:
- i) a first surface region of the optical element;
- and ii) a second surface region of the optical element,
- wherein:
- the first surface region surrounds the optically used region;
- the second surface region adjoins the first surface region so that a peripheral edge is present between the first and second surface regions;
- the one-piece film comprises a hydrophobic material at least on a side of the one-piece film facing away from the first and second surface regions;
- and
- the method further comprises disposing an adhesive layer between the optical element and the one-piece film so that the adhesive layer connects the one-piece film to the first and second surface regions of the optical element.
Dependencies are inferred from the claim text.