Modular ultraviolet pulsed laser-source
AssigneeCoherent Kaiserslautern GmbH
InventorRalf Knappe
Life of this patent
Estimating the term…
Abstract
Apparatus for generating ultraviolet (UV) pulsed laser-radiation for material-processing includes a laser-source providing infrared (IR) pulsed laser-radiation and a frequency-conversion module. A lithium tetraborate (Li2B4O7) crystal located within the frequency-conversion module converts the IR pulsed laser-radiation to UV pulsed laser-radiation by non-linear harmonic generation. The frequency-conversion module is an airtight enclosure that may be evacuated or contain a dry gas. A flexible optical fiber-assembly transports the IR pulsed laser-radiation from the laser-source to the frequency-conversion module.
Claims16
Apparatus for generating ultraviolet pulsed laser-radiation, comprising:
- a laser-source generating a beam of pulsed laser-radiation, the pulsed laser- radiation having a pulse-duration between about 100 femtoseconds and about 200 picoseconds;
- a frequency-conversion module, the frequency-conversion module having an enclosed interior volume that is sealed airtight;
- a hollow-core optical fiber arranged to transport the beam of pulsed laser-radiation from the laser-source to the frequency-conversion module, with the hollow core of the hollow-core optical fiber containing a gas and configured to spectrally broaden the laser-radiation passing through the fiber;
- a free space compressor for receiving the spectrally broadened laser-radiation and temporally compressing the pulses passing therethrough;
- a first non-linear crystal and a second non-linear crystal located within the enclosed interior volume of the frequency-conversion module;
- wherein the beam of pulsed laser-radiation propagates in recited order through the hollow-core optical fiber, the compressor, the first non-linear crystal, and the second non- linear crystal;
- and
- wherein the first non-linear crystal and the second non-linear crystal are arranged to generate a beam of ultraviolet pulsed laser-radiation.
Dependencies are inferred from the claim text.