System and method for separation of pump light and collected light in a laser pumped light source
AssigneeKLA-Tencor Corporation
InventorsAnatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
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AssigneeKLA-Tencor Corporation
InventorsAnatoly Shchemelinin, Ilya Bezel, Matthew Panzer, Eugene Shifrin
Estimating the term…
A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.
A system for separating pump light and collected light in a laser pumped light source comprising:
A system for separating pump light and collected light in a laser pumped light source comprising:
Dependencies are inferred from the claim text.