Method and apparatus for testing a semiconductor device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSzu-Chia Huang, Jhih Jie Shao, Tang-Hsuan Chung, Huan Chi Tseng
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Abstract
The present disclosure provides methods for testing and evaluating electrical parameters of electronic circuits. An exemplary method includes providing a device-under-test electrically coupled to a testing apparatus; and determining an optimum value of a first electrical parameter and an optimum value of a second parameter by testing the device-under-test according to a set of first electrical parameter values and a set of second electrical parameter values. The optimum value of the first electrical parameter and the optimum value of the second parameter are determined based on an electrical noise response of the device-under-test.
Claims7
A method comprising:
- providing a device-under-test electrically coupled to a testing apparatus;
- applying a set of first electrical parameter values to the testing apparatus;
- applying a set of second electrical parameter values to the device-under-test;
- monitoring an electrical noise response of the testing apparatus during the applying the set of the first electrical parameter values and the set of the second electrical parameter values;
- determining a selected first electrical parameter value from the set of the first electrical parameter values corresponding to each of the set of the second electrical parameter values that minimize the electrical noise response of the testing apparatus when applying the corresponding each of the set of second electrical parameter value;
- comparing the minimum electrical noise response for each of the selected first electrical parameter values corresponding to each of the set of the second electrical parameter values to determine an optimum first electrical parameter value from the selected first electrical parameter values that generate a least electrical noise response of the testing apparatus;
- determining the second electrical parameter value corresponding to the optimum first electrical parameter as an optimum second electrical parameter value from the set of the second electrical parameter values;
- and
- evaluating performance of the device-under-test using the optimum first electrical parameter value and the optimum second electrical parameter value.
Dependencies are inferred from the claim text.