Test structure and method for judging de-embedding accuracy of RF devices by using an introduced device

A method for judging the de-embedding accuracy of a RF device by using an introduced device, comprising the following steps:

• Step S00:
• providing a target device test structure D1 for the RF device, an introduced device test structure and a corresponding auxiliary test structure D5, wherein the introduced device test structure comprises a reference device test structure D2, a parallel test structure D3 of the target device and the reference device, a cascade test structure D4 of the target device and the reference device;
• Step S01:
• testing the S parameters of the target device test structure D1, the reference test structure D2, the parallel test structure D3, the cascade test structure D4, and the auxiliary test structure D5, respectively;
• Step S02:
• calculating the de-embedding S parameters of the target device test structure D1, the reference test structure D2, the parallel test structure D3 and the cascade test structure D4 according to the S parameters of the test structures D1-D4 and D5;
• Step S031:
• calculating a first result value X1 of the test performance parameters of the target device according to the above-calculated de-embedding S parameter of the target device test structure D1;
• Step S032:
• calculating a second result value X2 of the test performance parameters of the target device according to the above-calculated de-embedding S parameters of the reference test structure D2 and the parallel test structure D3;
• Step S033:
• calculating a third result value X3 of the test performance parameters of the target device according to the above-calculated de-embedding S parameters of the reference test structure D2 and the cascade test structure D4;
• Step SO4:
• obtaining error values by calculating the differences of X1 and X2, X2 and X3, and X1 and X3, and comparing the error values with the preset value to judge the accuracy and the applicable frequency range of the de-embedding method.