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US 10,520,527 B2Granted
Miniature device for ultra high sensitivity and stability probing in vacuum
AssigneesThe Regents of the University of California, The Regents of the University of Michigan
InventorsXiaoqing Pan, Thomas F. Blum, Mingjie Xu, Jake Jokisaari, Wilbur Bigelow
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to in situ transmission electron microscope (TEM) holders with improved stability and electrical sensitivity. The holders feature a front bearing seal and a rear bearing seal which allow the holders to achieve high sensitivity, high stability, large range of motion and high vacuum isolation. The bearings use a PEEK insulating disk as a pivot point for translation and tilting motion, and use O-rings to dampen vibrations, provide electrical and vacuum insulation, and to set a grabbing force between the bearing and the probe.
Claims20
A probe assembly (700) for a transmission electron microscope (TEM), the probe assembly (700) comprising:
- a. a probe holder assembly (710), having a front end (712) and a rear end (714);
- b. a probe manipulator (720), coupled to the rear end (714) of the probe holder assembly (710);
- c. a probe (730), passing through an interior of the probe holder assembly (710) between the front end (712) and the rear end (714);
- d. a front bearing (740), coupling the probe (730) with the probe holder assembly (710), the front bearing (740) comprising:
- i. a front insulating disk (742), having a through-hole (743) for the probe (730), the disk (742) being fixed in place within the probe holder assembly (710);
- ii. an internal O-ring groove (744) around an inner circumference of the through-hole (743);
- and
- iii. a front O-ring (745) inside the groove (744), configured to seal between the groove (744) and the probe (730), wherein the front O-ring (745) has a deformation of about 8-10 percent when it is squeezed between the probe (730) and the groove (744);
- and
- e. a rear bearing (750), coupling the probe (730) with the probe manipulator (720), the rear bearing (750) comprising:
- i. a rear insulating disk (752), having a through-hole (753) for the probe (730), the disk (752) being fixed in place within the probe manipulator (720);
- ii. an internal O-ring groove (754) around an inner circumference of the through-hole (753);
- and
- iii. a rear O-ring (755) inside the groove (754), configured to seal between the groove (754) and the probe (730), wherein the rear O-ring (755) has a deformation of about 14-16 percent when it is squeezed between the probe (730) and the groove (754);
- wherein the front (740) and rear (750) bearings are each configured to serve as a pivot point for motion of the probe (730) along an x axis and a y axis, wherein the front bearing (740) allows for slide-through motion of the probe (730) along a z-axis,
- wherein the rear bearing (750) does not allow for slide-through motion of the probe (730) along a z-axis, and
- wherein the bearings (740, 750) are each configured to serve as an electrically insulating vacuum seal with vibration dampening capability.
14 more elements
A probe assembly (700) for a transmission electron microscope (TEM), the probe assembly (700) comprising:
- a. a probe holder assembly (710), having a front end (712) and a rear end (714);
- b. a probe manipulator (720), coupled to the rear end (714) of the probe holder assembly (710);
- c. a probe (730), passing through an interior of the probe holder assembly (710) between the front end (712) and the rear end (714);
- d. a front bearing (740), coupling the probe (730) with the probe holder assembly (710), the front bearing (740) comprising:
- i. a through-hole (743) for the probe (730) within the probe holder assembly (710);
- ii. an internal O-ring groove (744) around an inner circumference of the through-hole (743);
- and
- iii. a front O-ring (745) inside the groove (744), configured to seal between the groove (744) and the probe (730);
- and
- e. a rear bearing (750), coupling the probe (730) with the probe manipulator (720), the rear bearing (750) comprising:
- i. a through-hole (753) for the probe (730) within the probe manipulator (720);
- ii. an internal O-ring groove (754) around an inner circumference of the through-hole (753);
- and
- iii. a rear O-ring (755) inside the groove (754), configured to seal between the groove (754) and the probe (730);
- wherein the front and rear bearings (740, 750) are each configured to serve as a pivot point for motion of the probe (730) along an x axis and a y axis, wherein the bearings (740, 750) are each configured to serve as an electrically insulating vacuum seal with vibration dampening capability.
12 more elements
A bearing (760) for a transmission electron microscope (TEM) probe, the bearing comprising:
- a. an insulating disk (762), having a through-hole (763) for the probe (730), the disk (762) being fixed in place within a probe holder assembly (710);
- b. an internal O-ring groove (764) around an inner circumference of the through-hole (763);
- and
- c. an O-ring (765) inside the groove (764), configured to seal between the groove (764) and the probe (730), wherein the O-ring (765) has a deformation of about 8-10 percent when it is squeezed between the probe (730) and the groove (764);
- wherein the bearing (760) is configured to serve as a pivot point for motion of the probe (730) along an x axis and a y axis and to allow for slide-through motion of the probe (730) along a z-axis, and
- wherein the bearing (760) is configured to serve as an electrically insulating vacuum seal with vibration dampening capability.
3 more elements
Dependencies are inferred from the claim text.