Sensor of volatile substances with integrated heater and process for manufacturing a sensor of volatile substances

A device, comprising:

• a substrate;
• a sensitive layer on the substrate;
• a first electrode structure on the sensitive layer, the first electrode structure includes a first electrode finger, a second electrode finger, and a third electrode finger that are coupled together;
• a second electrode structure on the sensitive layer, the second electrode structure having a serpentine shape, the second electrode structure being capacitively coupled to the first electrode finger and to the second electrode finger, the sensitive layer being between the first electrode structure and the second electrode structure;
• a third electrode structure on the sensitive layer, the third electrode structure having a fourth electrode finger capacitively coupled to the second electrode finger and the third electrode finger, the first, second, and third electrode structures being coplanar;
• and
• a supply device configured to couple a heating current through the first, second, and third electrode fingers of the first electrode structure in a first operating condition to heat the sensitive layer, the second and third electrode structures remaining uncoupled from the heating current of the supply device.

A device, comprising:

• a substrate;
• a cavity in the substrate;
• a hygroscopic polymer in the cavity;
• a first electrode structure on a plane in the cavity, the first electrode structure having a first plurality of electrode fingers;
• a second electrode structure on the plane in the cavity, the second electrode structure having a second plurality of electrode fingers, the first plurality of electrode fingers extending between the second plurality of electrode fingers;
• a third electrode structure on the plane in the cavity, the third electrode structure having a serpentine shape that is positioned between adjacent ones of the first and second pluralities of electrode fingers;
• and
• a supply device configured to couple a heating current to the first electrode structure to transfer heat to the hygroscopic polymer, while the second electrode structure and the third electrode structure remain uncoupled from the heating current of the supply device.