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US 10,520,422 B2Granted
Optical micro-particles detector
AssigneeIndustrial Technology Research Institute
InventorsWei-Lan Chiu, Hsiang-Hung Chang
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Abstract
An optical micro-particle detector including a light source, a gas channel and a plurality of optical detectors is provided. The light source is configured to generate a light beam. The gas channel has at least one curved segment. The curved segment has a light entrance and a plurality of light exits. The light beam from the light source enters the gas channel through the light entrance. The plurality of optical detectors are optically coupled to the light exits, respectively.
Claims22
An optical micro-particle detector, comprising:
- a light source, configured to generate a light beam;
- a gas channel having at least one curved segment, wherein the at least one curved segment has a light entrance and a plurality of light exits, and the light beam from the light source passes through the light entrance and enters the gas channel;
- and
- a plurality of optical detectors, optically coupled to the plurality of light exits, respectively.
1 more element
Dependencies are inferred from the claim text.