Vacuum gauge state detection method and system
AssigneeAzbil Corporation
InventorsMasaru Soeda, Takuya Ishihara, Masashi Sekine, Hidenobu Tochigi
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Abstract
A state determination unit compares an output value obtained by a measuring unit with a reference characteristic value that serves as a reference, counts the number of times an excessive pressure application state occurs in which the output value is determined to be equal to or larger than the reference characteristic value, and determines whether the number of times reaches an upper limit that is set. An alarm output unit outputs an alarm when the state determination unit determines that the number of times the output value is equal to or larger than the reference characteristic value reaches the set upper limit.
Claims8
A vacuum gauge state detection method for determining when to perform a zero-point adjustment, by detecting a state of a diaphragm of a vacuum gauge, the vacuum gauge being constituted by a sensor chip including the diaphragm that is displaceable and that senses pressure from a measurement target, the sensor chip detecting a deflection of the diaphragm as a capacitance change, the method comprising:
- obtaining an output value of the vacuum gauge;
- comparing the obtained output value with a reference characteristic value that serves as a reference to determine that an excessive pressure application state occurs in which the sensor chip senses pressure exceeding a predetermined level of pressure;
- counting a number of times the excessive pressure application state occurs in which the obtained output value of the vacuum gauge is determined to be equal to or larger than the reference characteristic value;
- determining whether the counted number of times reaches an upper limit;
- and
- when determining that the counted number of times reaches the upper limit, outputting an alarm indicating that the zero-point adjustment needs to be performed.
A vacuum gauge state detection system for determining when to perform a zero-point adjustment, comprising:
- a vacuum gauge including a sensor chip including a diaphragm that is displaceable and that senses pressure from a measurement target, the sensor chip detecting a deflection of the diaphragm as a capacitance change;
- and
- processing circuitry configured to
- obtain an output value of the vacuum gauge,
- compare the obtained output value with a reference characteristic value that serves as a reference to determine that an excessive pressure application state occurs in which the sensor chip senses pressure exceeding a predetermined level of pressure,
- count a number of times the excessive pressure application state occurs in which the obtained output value of the vacuum gauge is determined to be equal to or larger than the reference characteristic value,
- determine whether the counted number of times reaches an upper limit;
- and
- when determining that the counted number of times reaches the upper limit, output an alarm indicating that the zero-point adjustment needs to be performed.
Dependencies are inferred from the claim text.