Photonic pressure sensor device and methods of use thereof
AssigneeMicatu Inc.
InventorsAtul Pradhan, Scott Stelick
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AssigneeMicatu Inc.
InventorsAtul Pradhan, Scott Stelick
Estimating the term…
A photonic pressure sensor device includes a cantilever pivotally attached to a fixed mount. The cantilever has an electromagnetic reactive material located thereon that is configured to cause a movement of the cantilever based on a photonic pressure exerted on the electromagnetic reactive material from an electromagnetic radiation source incident on the material. An etalon is coupled to the cantilever such that a position of the etalon changes based on the movement of the cantilever. A light source is optically coupled to the etalon to provide a light beam to the etalon. The change in the position of the etalon causes interference of the light within the etalon resulting in an interference light beam. A light detector is positioned to receive the interference light beam from the etalon and configured to measure an intensity value for the interference light beam.
A photonic pressure sensor device comprising:
A method of making a photonic pressure sensor device comprising:
Dependencies are inferred from the claim text.