Optical fiber temperature sensors, temperature monitoring apparatus, and manufacturing methods
AssigneeApplied Materials, Inc.
InventorMatthew Busche
Life of this patent
Estimating the term…
Abstract
An optical fiber temperature sensor including a lead-in fiber and black body emitter. The lead-in optical fiber includes a fiber end, and the black body emitter is fused on the fiber end, wherein the black body emitter is made up of a melted high emissivity material included integrally in melted silica. Further embodiments include temperature monitoring apparatus with one or more optical fiber temperature sensors, and electronic device processing apparatus including optical fiber temperature monitoring. Numerous other aspects and embodiments are included.
Claims20
An optical fiber temperature sensor, comprising:
- a lead-in fiber including a fiber end;
- and
- a black body emitter fused on the fiber end, the black body emitter comprising a continuously arcuate profile along its entire length and including melted high emissivity material included integrally in melted silica, wherein the black body emitter comprises a first portion having a first composition comprising an intermixture of the melted silica, melted fluorine-doped silica and the melted high emissivity material, and wherein the black body emitter further comprises a second portion having a second composition comprising a majority silica or doped silica.
A temperature monitoring apparatus, comprising:
- a substrate platform;
- a channel formed in the substrate platform;
- and
- an optical fiber temperature sensor received in the channel, the optical fiber temperature sensor including:
- a lead-in fiber including a fiber end, and
- a black body emitter fused on the fiber end, the black body emitter comprising a continuously arcuate profile along its entire length and including a melted high emissivity material included integrally in melted silica, wherein the black body emitter comprises a first portion having a first composition comprising an intermixture of the melted silica, melted fluorine-doped silica and the melted high emissivity material, and wherein the black body emitter further comprises a second portion having a second composition comprising a majority silica or doped silica.
Dependencies are inferred from the claim text.