Fiber-optic temperature and flow sensor system and methods

A fiber-optic sensor, comprising:

• an optical fiber configured to be coupled to a light source and a spectrometer;
• and
• a first silicon layer fusion spliced to an end face of the optical fiber, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, where the sensor head reflects light from the light source to the spectrometer;
• further comprising:
• a second silicon layer disposed on the first silicon layer, where a first silicon layer length is different from a second silicon layer length.

A fiber-optic micro-heater comprising:

• an optical fiber configured to be coupled to a light source and a spectrometer;
• a first silicon layer fusion spliced to an end face of the optical fiber, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, where the sensor head reflects light from the light source to the spectrometer;
• and
• a heating light source coupled to the optical fiber;
• wherein the first silicon layer comprises a double sided-polished silicon pillar having a smaller diameter than a diameter of the optical fiber.

A process for utilizing a fiber-optic sensor, comprising:

• causing a light source to transmit light through an optical fiber to a fiber-optic micro-heater, where the fiber-optic micro-heater includes a silicon layer that is fusion spliced to an end face of the fiber-optic micro-heater, where the first silicon layer defines a Fabry-Pérot interferometer and a sensor head, and wherein the first silicon layer comprises a double sided-polished silicon pillar having a smaller diameter than a diameter of the optical fiber;
• receiving reflected light from the fiber-optic micro-heater using a spectrometer, the spectrometer based on a transmission grating and a diode array;
• and
• analyzing an output from the spectrometer based on received reflected light.