Two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement, comprising:

• a platform, a first flexible hinge, and a moving pair that is fastened on the platform through the first flexible hinge, wherein the platform is a cube-shaped platform;
• the moving pair comprises a first rigid beam, a second flexible hinge, a second rigid beam, a third flexible hinge, and an L-shaped rigid beam;
• the first rigid beam is connected to the second rigid beam through the second flexible hinge, the second rigid beam is connected to the L-shaped rigid beam through the third flexible hinge, and the L-shaped rigid beam is connected to the platform through the first flexible hinge;
• the first rigid beam is fastened on a rack through a fastening member;
• there are four moving pairs in total;
• each moving pair and one first flexible hinge constitute one branch hinge, and there are four branch hinges in total;
• the four branch hinges are respectively located on upper, lower, left, and right surfaces of the platform, and the four branch hinges drive, through the first flexible hinge, the platform to generate displacement in an x-direction and a y-direction.