Circuit for physical quantity detection device, physical quantity detection device, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorsKiminori Nakajima, Koji Ushiyama, Takashi Aoyama, Koji Miyashita
Life of this patent
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Abstract
A circuit for a physical quantity detection device includes a drive unit that generates a drive signal that causes an vibrator to vibrate, a detection unit that detects a detection signal outputted from the vibrator based on the drive signal, a passive filter which has a filter characteristic in which a cutoff frequency is lower than a detuning frequency and a cutoff frequency band contains a frequency band higher than the cutoff frequency and to which a signal from the detection unit is inputted, and an amplification unit that amplifies a signal from the passive filter.
Claims14
A circuit for a physical quantity detection device, the circuit comprising:
- a semiconductor substrate;
- a drive unit that generates a drive signal, the drive signal causing a vibrator to vibrate;
- a detection unit that detects a detection signal outputted from the vibrator based on the drive signal;
- a passive filter which has a filter characteristic in which a cutoff frequency is lower than a detuning frequency and in which a cutoff frequency band contains a frequency band higher than the cutoff frequency, a signal from the detection unit being inputted to the passive filter;
- a wiring line that is provided in the semiconductor substrate and is electrically connected to the passive filter;
- and
- a first shield wiring line that is provided in the semiconductor substrate so that the first shield wiring line is separated from the wiring line and juxtaposed to at least part of the wiring line in a portion downstream of the passive filter in a plan view.
Dependencies are inferred from the claim text.