Physical quantity detecting vibration element, physical quantity sensor, electronic apparatus, and moving object
AssigneeSeiko Epson Corporation
InventorsSeiichiro Ogura, Ryuta Nishizawa
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AssigneeSeiko Epson Corporation
InventorsSeiichiro Ogura, Ryuta Nishizawa
Estimating the term…
A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.
A physical quantity detecting vibration element comprising:
Dependencies are inferred from the claim text.