Vibration isolator

Abstract

A vibration isolator includes: a vibration isolator moving part that suppresses vibration caused by operation of a drive unit moving part; a vibration isolating speed generation unit that generates a vibration isolating command speed on the basis of a target position of the drive unit moving part; a return speed generation unit that generates a return command speed for returning the vibration isolator moving part to an original position; a control speed generation unit that generates a control command speed by adding the vibration isolating command speed generated by the vibration isolating speed generation unit and the return command speed generated by the return speed generation unit; and a vibration isolation control unit that controls the vibration isolator moving part on the basis of the control command speed generated by the control speed generation unit.

Dependencies are inferred from the claim text.