Sputtering target comprising Al—Te—Cu—Zr alloy, and method for producing same
AssigneeJX Nippon Mining & Metals Corporation
InventorYoshimasa Koido
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Abstract
An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target. An object of the present invention is to provide an Al—Te—Cu—Zr alloy sputtering target capable of effectively reducing particle generation, nodule formation and the like upon sputtering and further capable of reducing oxygen contained in the target.
Claims18
An Al—Te—Cu—Zr alloy sputtering target, comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target.
A method of manufacturing an Al—Te—Cu—Zr alloy sputtering target comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target, the method comprising the steps of:
- dissolving a Cu raw material and a Te raw material to produce a CuTe alloy ingot;
- pulverizing the CuTe alloy ingot;
- then hot-pressing the pulverized CuTe powder and a Zr raw material powder to produce a CuTeZr alloy;
- then pulverizing the CuTeZr alloy;
- hot-pressing the pulverized CuTeZr powder and an Al raw material powder to produce a CuTeZrAl alloy.
A method of manufacturing an Al—Te—Cu—Zr alloy sputtering target comprising 20 at % to 40 at % of Te, 5 at % to 20 at % of Cu, 5 at % to 15 at % of Zr and the remainder of Al, wherein a Te phase, a Cu phase and a CuTe phase are not present in a structure of the target, the method comprising the steps of:
- dissolving a Cu raw material and a Te raw material to produce a CuTe alloy ingot;
- pulverizing the CuTe alloy ingot;
- then hot-pressing the pulverized CuTe powder, a Zr raw material powder and an Al raw material powder to produce the CuTeZrAl alloy.
Dependencies are inferred from the claim text.