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US 10,519,029 B2Granted
Micromechanical component
AssigneeRobert Bosch GmbH
InventorOdd-Axel Pruetz
Life of this patent
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Abstract
A micromechanical component is provided, the micromechanical component including a deflection device which is deflectable parallel to a deflection direction, and the micromechanical component including a damping device, a surface of the deflection device facing the damping device being greater than a sectional area of the deflection device disposed perpendicular to the deflection direction and situated in a region of the deflection device that is facing away from the damping device.
Claims12
A micromechanical component, comprising:
- a deflection device, which is deflectable along a deflection direction;
- and
- a damping device;
- wherein an area of a surface of the deflection device facing the damping device is greater than a sectional area of the deflection device disposed perpendicular to the deflection direction and situated in a region of the deflection device facing away from the damping device, and
- wherein the deflection device and the damping device are relatively movable toward each other and away from each other.
2 more elements
Dependencies are inferred from the claim text.