Method for conveying reaction tube unit
AssigneeTokyo Electron Limited
InventorsMasahiro Kobayashi, Tamotsu Hatakeyama, Harunari Hasegawa, Michihiro Takahashi, Daisuke Yamanaka
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Abstract
A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method includes: arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision; placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator; and conveying the reaction tube unit by moving the carriage.
Claims14
A method for conveying a reaction tube unit including a vertical reaction tube and a gas supply pipe provided at a distance from an inner wall of the vertical reaction tube along a longitudinal direction thereof, the method comprising:
- arranging a buffer inside the reaction tube between the inner wall and the gas supply pipe to alleviate a collision;
- placing the reaction tube unit attached with the buffer on a carriage via a vibration isolator;
- and
- conveying the reaction tube unit by moving the carriage.
Dependencies are inferred from the claim text.