US 10,518,237 B2 · Gas distribution unit for fluidized bed reactor system, fluidized bed reactor system having the gas distribution unit, and method for preparing granular polycrystalline silicon using the fluidized bed reactor system

Abstract

The present invention relates to a gas distribution unit for a fluidized bed reactor system, a fluidized bed reactor system having the gas distribution unit, and a method for preparing granular polysilicon using the fluidized bed reactor system. The gas distribution unit for a fluidized bed reactor system according to the present invention enables gas flow rate control and gas composition control for each zone within the plenum chamber. In addition, a fluidized bed reactor system having the gas distribution unit enables shape control of a fluidized bed (in particular, transition between a bubbling fluidized bed and a spout fluidized bed). The method for preparing granular polysilicon using the fluidized bed reactor system not only simultaneously improves process stability and productivity, but also enables more flexible handling in the event of an abnormal situation.

Claims14

Dependent claims

A gas distribution unit (200) for a fluidized bed reactor system that injects a gas into a fluidized bed reaction chamber 100 via a plenum chamber (210) and a perforated plate (290),

wherein the plenum chamber (210) includes:
a plurality of annular partition walls (220) arranged concentrically and spaced apart from each other;
a plurality of annular spaces (230) partitioned by the annular partition walls and each independently having at least one gas inlet (232) and a plurality of gas outlets (235);
a plurality of gas supply pipes (240) connected to the gas inlets (232) and independently supplying gas to the annular spaces (230);
and a plurality of gas discharge pipes (250) connected to the respective gas outlets (235), and
wherein the perforated plate (290) is in contact with an end of the gas discharge pipes (250) of the plenum chamber (210) and has a plurality of openings corresponding to the gas discharge pipes (250).

3 more elements

Dependencies are inferred from the claim text.

Gas distribution unit for fluidized bed reactor system, fluidized bed reactor system having the gas distribution unit, and method for preparing granular polycrystalline silicon using the fluidized bed reactor system

Life of this patent

Gas distribution unit for fluidized bed reactor system, fluidized bed reactor system having the gas distribution unit, and method for preparing granular polycrystalline silicon using the fluidized bed reactor system

Life of this patent

Abstract

Claims14