Treatment solution supply apparatus

A treatment solution supply apparatus for supplying a treatment solution to a treatment solution discharge unit that discharges the treatment solution to a treatment body, the treatment solution supply apparatus comprising:

• a temporary storage apparatus that has a storage chamber temporarily storing the treatment solution supplied from a treatment solution supply source that stores the treatment solution;
• a filter in downstream fluid communication from the temporary storage apparatus, wherein the filter removes a foreign substance in the treatment solution flowing from the temporary storage apparatus;
• a pump in downstream fluid communication from the filter, wherein the pump sends the treatment solution from which the foreign substance has been removed by the filter to the treatment solution discharge unit;
• and
• a controller,
• wherein the temporary storage apparatus has a diaphragm capable of being deformed to change a capacity inside the storage chamber;
• and
• wherein the controller is configured to cause the capacity of the storage chamber to change to control pressure-feeding of the treatment solution stored in the storage chamber to the filter so that a hydraulic pressure in the filter becomes a desired pressure.