Resist composition and method for forming resist pattern
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorTatsuya Fujii
Life of this patent
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Abstract
A resist composition includes a base material component and a fluorine additive component. The fluorine additive component contains a fluororesin component having a structural unit containing a base dissociable group. The base material component contains a structural unit containing an acid-decomposable group in an amount of 30 mol % or more and an amount of 10 mol % or more of a resin component having a structural unit represented by formula (a10-1): where R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, Yax1 is a single bond or a divalent linking group, Wax1 is a (nax1+1) valent aromatic hydrocarbon group, and nax1 is an integer of 1 to 3.
Claims6
A resist composition which generates an acid upon exposure and whose solubility in a developing solution changes under the action of the acid, the resist composition comprising:
- a base material component (A) whose solubility in the developing solution changes under the action of an acid, and which comprises a resin component (A1) having a structural unit (a10) represented by general formula (a10-1) in an amount of 10 mol % or more and a structural unit (a1) represented by general formula (a1-1-1) in an amount of 30 mol % or more;
- an acid generator component (B) which generates an acid upon exposure;
- and
- a fluorine additive component (F) which exhibits the decomposability with respect to an alkali developing solution and comprises a fluororesin component (F1) having a structural unit (f1) containing a base dissociable group:
- wherein R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms;
- Va1 is a divalent hydrocarbon group which may have an ether bond;
- na1 is an integer of 0 to 2;
- Ra1″ is an acid dissociable group represented by general formula (a1-r2-2);
- Ya is a carbon atom;
- Xa is a group forming a cyclic hydrocarbon group together with Ya, provided that at least one hydrogen atom contained in the cyclic hydrocarbon group may be substituted;
- Ra01 to Ra03 each independently represent, a hydrogen atom, a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms, or a monovalent aliphatic cyclic saturated hydrocarbon group having 3 to 20 carbon atoms, provided that at least one hydrogen atom contained in the chain saturated hydrocarbon group and the aliphatic cyclic saturated hydrocarbon group may be substituted;
- two or more of Ra01 to Ra03 may be bonded to each other to form a cyclic structure;
- * represents a bond;
- wherein R is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, Yax1 is a single bond, Wax1 is a group obtained by removing (nax1+1) hydrogen atoms from benzene, naphthalene, anthracene, phenanthrene, pyridine or thiophene, and nax1 is an integer of 1 to 3.
Dependencies are inferred from the claim text.