X-ray thin film inspection device

An X-ray thin film inspection device comprises:

• a sample stage having an upper surface on which an inspection target is disposed;
• an image observing unit that is adapted to observe an image of an inspection target site of the inspection target disposed on the upper surface of the sample stage;
• a positioning mechanism that is controlled based on an image observation result by the image observing unit to move the sample stage in two directions that are perpendicular to each other on a horizontal plane, a height direction, and an in-plane rotating direction that are perpendicular to the horizontal plane, thereby positioning a site-under-measurement of the inspection target at a preset inspection position of the device;
• an X-ray irradiation unit that irradiates X-rays to the site-under-measurement of the inspection target disposed at the inspection position;
• a fluorescence X-ray detector that detects fluorescence X-rays generated from the site-under-measurement of the inspection target disposed at the inspection position;
• a temperature measuring unit that is adapted to measure an external temperature for estimating an internal temperature of the X-ray thin film inspection device;
• and
• a temperature correction system that corrects the inspection position based on the temperature measured by the temperature measuring unit and a positional variation,
• wherein the temperature correction system specifies factors causing positional variation following temperature variation, estimates positional variation following temperature variation in consideration of a coefficient relating to time lapse (time constant τ) and a coefficient relating to temperature variation (temperature constant C) of each positional variation factor, and corrects the inspection position based on the estimated positional variation.