Deposition process
AssigneesPilkington Group Limited, University College London
InventorsDeborah Raisbeck, Simon James Hurst, Ivan P. Parkin, Claire J. Carmalt, Joe A. Manzi
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Abstract
A process for depositing an inorganic material on a substrate, the process comprising, providing a substrate having a surface, providing a precursor mixture comprising a metal sulfonate, and delivering the precursor mixture to the surface of the substrate, wherein the surface of the substrate is at a substrate temperature of above 450° C. and is sufficient to effect decomposition of the metal sulfonate. The inorganic material may include a metal or a metal oxide. The preferred metal sulfonate is metal triflate.
Claims24
A process for depositing a metal and/or a metal oxide on a glass substrate, the process comprising,
- providing a glass substrate having a surface,
- providing a precursor mixture comprising a metal sulfonate,
- at least partially atomizing the precursor mixture, and
- delivering the at least partially atomized precursor mixture to the surface of the glass substrate, wherein the surface of the glass substrate is at a substrate temperature above 500° C. at the time the precursor mixture is delivered to the surface and is sufficient to effect decomposition of the metal sulfonate.
A process for depositing a coating comprising an inorganic material selected from the group consisting of zinc oxide, aluminium oxide, copper oxide, copper metal, indium oxide, and silver metal on a glass substrate, the process comprising,
- providing a glass substrate having a surface,
- providing a precursor mixture comprising a metal trifluoromethanesulfonate, wherein the metal is selected from the group consisting of zinc, aluminium, copper, indium, and silver, and
- delivering the precursor mixture to the surface of the substrate, wherein the surface of the substrate is at a substrate temperature above 500° C. at the time the precursor mixture is delivered to the surface to effect decomposition of the metal trifluoromethanesulfonate.
Dependencies are inferred from the claim text.