Table apparatus, positioning apparatus, flat panel display manufacturing apparatus, and precision machine

A table apparatus comprising:

• a base member having a guide surface;
• a table that is supported on the base member, is movable in a first axis direction parallel to a first axis in a predetermined plane parallel to the guide surface and in a second axis direction parallel to a second axis orthogonal to the first axis in the predetermined plane, and is rotatable about a central axis of the table parallel to a third axis orthogonal to the predetermined plane;
• a first driver that applies force in the first axis direction to the table;
• and
• a second driver that applies force in the second axis direction to the table, wherein
• the first driver includes:
• a first actuator that is supported by the base member and generates power for moving the table in the first axis direction;
• and a first movable member that is coupled to the table and moves along a first drive axis parallel to the first axis by actuation of the first actuator,
• the second driver includes:
• a second actuator that is supported by the base member and generates power for moving the table in the second axis direction;
• and a second movable member that is coupled to the table and moves along a second drive axis parallel to the second axis by actuation of the second actuator,
• the first driver is only one first driver, and the only one first driver is provided such that, in the second axis direction, a position of the central axis of the table is aligned with a position of the first drive axis,
• the second driver comprises at least two second drivers, and the at least two second drivers are provided such that, in the first axis direction, a position of the central axis of the table differs from a position of each second drive axis, and
• the first movable member includes:
• a first linear bearing that is guided by a first guide member provided on the base member and moves along the first drive axis;
• a first rotary bearing that is disposed around a first rod member fixed to the first linear bearing and is rotatable relative to the first rod member about a central axis of the first rod parallel to the third axis;
• and a second linear bearing that is connected to the first rotary bearing and is guided in the second axis direction by a second guide member fixed to an edge of the table in the first axial direction.