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US 10,509,010 B2Granted
Vacuum processing apparatus and mass spectrometer
AssigneeShimadzu Corporation
InventorTomoyoshi Matsushita
Life of this patent
Estimating the term…
Abstract
A vacuum processing apparatus 1 includes a processing chamber 3 that can bring an inside of the processing chamber into a vacuum state, a load lock chamber 2 that is coupled to the processing chamber 3 and that is switchable between an atmospheric state and the vacuum state, a communication unit 10 configured to communicate the processing chamber 3 and the load lock chamber 2, a stage 5 on which a processing object 9 is placed, the stage being movable between the processing chamber 3 and the load lock chamber 2 through the communication unit 10, and a sealing unit 6 fixed to the stage 5, the sealing unit being larger than an opening 300 of the communication unit 10 on a side of the processing chamber 3.
Claims5
A vacuum processing apparatus comprising:
- a processing chamber that can bring an inside of the processing chamber into a vacuum state;
- a load lock chamber that is coupled to the processing chamber and that is switchable between an atmospheric state and the vacuum state;
- a communication unit configured to communicate the processing chamber with the load lock chamber;
- a stage on which a processing object is placed, the stage being movable between the processing chamber and the load lock chamber through the communication unit;
- and
- a sealing unit fixed to the stage, the sealing unit being larger than an opening of the communication unit on a processing chamber side;
- a plate-shaped member rotatably provided on a horizontal axis placed above the opening of the communication unit on the processing chamber side in an inner wall of the processing chamber, the plate-shaped member being switchable between a closed state in which the plate-shaped member abuts on the inner wall and an opened state in which the plate-shaped member is detached from the inner wall;
- and
- a penetration opening formed in the plate-shaped member to allow the stage to pass, wherein:
- an opening end of the penetration opening on the inner wall side is formed at a position corresponding to the opening of the communication unit on the processing chamber side when the plate-shaped member is in the closed state, while the penetration opening is inclined obliquely downward as the penetration opening goes away from the inner wall,
- an inclined portion inclined obliquely downward at an angle equal to that of the penetration opening is formed at an end of the stage on a side on which the sealing unit is fixed as it approaches the sealing unit,
- the sealing unit is larger than an opening end of the penetration opening on a side opposite to the inner wall, and
- in a state in which the stage is located on a load lock chamber side, the inclined portion of the stage is disposed inside the penetration opening, and the sealing unit abuts on the plate-shaped member to bring the plate-shaped member into the closed state.
10 more elements
A mass spectrometer comprising:
- a processing chamber that can bring an inside of the processing chamber into a vacuum state;
- a load lock chamber that is coupled to the processing chamber and that is switchable between an atmospheric state and the vacuum state;
- a communication unit configured to communicate the processing chamber with the load lock chamber;
- a stage on which a processing object is placed, the stage being movable between the processing chamber and the load lock chamber through the communication unit;
- and
- a sealing unit fixed to the stage, the sealing unit being larger than an opening of the communication unit on a processing chamber side;
- a plate-shaped member rotatably provided on a horizontal axis placed above the opening of the communication unit on the processing chamber side in an inner wall of the processing chamber, the plate-shaped member being switchable between a closed state in which the plate-shaped member abuts on the inner wall and an opened state in which the plate-shaped member is detached from the inner wall;
- and
- a penetration opening formed in the plate-shaped member to allow the stage to pass, wherein:
- an opening end of the penetration opening on the inner wall side is formed at a position corresponding to the opening of the communication unit on the processing chamber side when the plate-shaped member is in the closed state, while the penetration opening is inclined obliquely downward as the penetration opening goes away from the inner wall,
- an inclined portion inclined obliquely downward at an angle equal to that of the penetration opening is formed at an end of the stage on a side on which the sealing unit is fixed as it approaches the sealing unit,
- the sealing unit is larger than an opening end of the penetration opening on a side opposite to the inner wall, and
- in a state in which the stage is located on a load lock chamber side, the inclined portion of the stage is disposed inside the penetration opening, and the sealing unit abuts on the plate-shaped member to bring the plate-shaped member into the closed state.
10 more elements
Dependencies are inferred from the claim text.