Vacuum drying system and vacuum drying method

A vacuum drying method comprising the following steps:

• Providing a vacuum drying chamber to dry a substrate in vacuum;
• providing within the vacuum drying chamber:
• a support platform, which is used to support the substrate, wherein the support platform comprises a plurality of sub-platforms arranged along a predetermined direction and wherein the support platform comprises has gaps between adjacent sub-platforms;
• a mechanical arm which comprises a plurality of strip structures at positions corresponding to the gaps, wherein the mechanical arm is used to place the substrate onto the support platform or move the substrate out of the support platform;
• a plurality of support bars, wherein a width of the support bar is equal to a width of the gap, a length of the support bar is equal to a length of the gap, and the plurality of support bars are configured in such a manner that surfaces of the plurality of support bars facing the substrate are flush with a support surface of the support platform when the plurality of support bars are inserted into the gaps, thereby a force on the substrate is even during a supporting process;
• and
• a control unit, which is configured to control the mechanical arm and the plurality of support bars to move out of the gaps of the support platform or move into the gaps of the support platform;
• and
• controlling the mechanical arm to place the substrate onto the support platform or move the substrate out of the support platform in response to a received instruction.