Back to results
US 10,508,337 B2Granted
Atomic layer deposition-inhibiting material
AssigneeMurata Manufacturing Co., Ltd.
InventorNaoki Iwaji
Life of this patent
Estimating the term…
Abstract
An atomic layer deposition-inhibiting material composed of a fluorine-containing resin that has a fluorine content of 30 at % or greater, has at least one tertiary carbon atom and quaternary carbon atom, and lacks ester groups, hydroxyl groups, carboxyl groups, and imide groups.
Claims3
An atomic layer deposition-inhibiting material comprising a fluorine-containing resin represented by the following formula (I):
- X—[(CR12)p—CR4R5—(CR22)r—CR6R7—(CR32)q]n—Y (I)
- where:
- X and Y each independently is H, F, or CR113;
- R11 each independently is H or F;
- R1, R2, and R3 each independently is H or F;
- R4 and R6 each independently is H, F, or an alkyl group having 1 to 6 carbon atoms;
- R5 and R7 each independently is an alkyl group having 1 to 6 carbon atoms;
- or
- R5 and R7 may together form a group represented by the following formula:
- —(O)s—(CR122)t—
- where
- R12 represents H, F, or an alkyl group having 1 to 6 carbon atoms,
- s represents an integer of 0 to 2, and t represents an integer of 1 to 6;
- p, q, and r each independently is an integer of 0 to 6;
- and
- n is a natural number.
13 more elements
Dependencies are inferred from the claim text.