Laser adjustment method and laser source device

A laser adjustment method in a laser source device including an excitation light source emitting excitation light;

• a laser medium receiving the excitation light and generating fundamental wave light;
• a nonlinear optical crystal converting the fundamental wave light to harmonic light having a desired wavelength;
• an etalon allowing light of a predetermined wavelength to pass;
• a resonator housing accommodating the laser medium, the nonlinear optical crystal, and the etalon on an interior of the resonator housing;
• a first temperature adjuster controlling temperatures of the laser medium and the nonlinear optical crystal;
• a second temperature adjuster controlling a temperature of the etalon;
• and a controller controlling the first temperature adjuster and the second temperature adjuster, the laser adjustment method comprising:
• a first adjustment process comprising:
• detecting, using a light detector, optical intensity and wavelength of the harmonic light, and
• adjusting, using the first temperature adjuster, the temperatures of the laser medium and the nonlinear optical crystal such that the detected wavelength of the harmonic light approaches a desired wavelength and such that the optical intensity of the harmonic light reaches at least a first predetermined value corresponding to the maximum output signal output from the light detector;
• and
• a second adjustment process comprising:
• detecting, after the first adjustment process and using the light detector, the optical intensity and wavelength of the harmonic light, and
• adjusting the angle of the etalon using an etalon angle controller and subsequently adjusting, using the second temperature adjuster, the temperature of the etalon such that the detected wavelength of the harmonic light approaches the desired wavelength and such that the optical intensity of the harmonic light reaches at least an optical intensity for the detected wavelength of the harmonic light detected by the light detector, while maintaining the adjusted temperatures of the laser medium and the nonlinear optical crystal based on a control signal received from the controller.