# US 10,504,911 B2 · Integrated structures and methods of forming integrated structures

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- Number: US 10,504,911 B2
- Document ID: US10504911B2
- Status: Granted
- Kind: B2
- Application number: 16/406,504
- Filed: 2019-05-08
- Published: 2019-08-29
- Granted: 2019-12-10
- Earliest claimed: 2015-11-16
- Assignees: Micron Technology, Inc.
- Applicants: Micron Technology, Inc.
- Inventors: Yongjun Jeff Hu; Allen McTeer
- Web page: https://patentgrep.com/patent/US10504911B2

## CPC

- H10B 41/35: with a cell select transistor, e.g. NAND
- H10B 43/27: the channels comprising vertical portions, e.g. U-shaped channels
- H10B 43/35: with cell select transistors, e.g. NAND
- H10P 14/3806: {using crystallisation-enhancing elements}
- H10P 36/03: {within silicon bodies}
- H10B: ELECTRONIC MEMORY DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Some embodiments include an integrated structure having semiconductor material within a region between two parallel surfaces. The semiconductor material has grain boundaries parallel to the parallel surfaces. At least one circuit component utilizes a region of the semiconductor material in a gated device. The semiconductor material has little if any metal therein so that the gated device has Ion/Ioff characteristics similar to if the semiconductor material had no metal therein. Some embodiments include a method in which semiconductor material is provided between a pair of parallel surfaces, and in which the parallel surfaces and semiconductor material extend between a first end and a second end. Metal is formed adjacent the first end, and gettering material is formed adjacent the second end. Thermal processing induces crystallization of the semiconductor material and drives the metal along the semiconductor material and into the gettering material. The gettering material is then removed.

## Claims

### Claim 1

An integrated structure comprising semiconductor material within a region between two parallel surfaces, the semiconductor material having grain boundaries parallel to the parallel surfaces; at least one circuit component utilizing a region of the semiconductor material in a gated device; the semiconductor material having little if any metal therein so that the gated device has Ion/Ioff characteristics within a same order of magnitude as would occur if the semiconductor material had no metal therein.

### Claim 2 (depends on 1)

The integrated structure of claim 1 having a NAND string with the parallel surfaces being on opposing sides of a channel region; the gated device being one of a plurality of gated devices corresponding to memory cells of the NAND string, and a metal concentration being low or non-existent throughout an entirety of the channel region so that all of the memory cells of the NAND string have said Ion/Ioff characteristics.

### Claim 3 (depends on 1)

The integrated structure of claim 1 having a U-shaped NAND string with the parallel surfaces being U-shaped and on opposing sides of a channel region; the semiconductor material being within the channel region and the grain boundaries following the U-shaped surfaces; the gated device being one of a plurality of gated devices corresponding to memory cells of the NAND string, and a metal concentration being low or non-existent throughout an entirety of the channel region so that all of the memory cells of the NAND string have said Ion/Ioff characteristics.

### Claim 4 (depends on 1)

The integrated structure of claim 1 having multiple tiers of thin-film-transistor NAND flash memory, and having the parallel surfaces on opposing sides of channel regions within the tiers; the semiconductor material being within the channel regions; the gated device being one of a plurality of gated devices corresponding to memory cells of the NAND flash memory, and a metal concentration being low or non-existent throughout an entirety of the channel regions so that all of the cells of the NAND flash memory have said Ion/Ioff characteristics.

### Claim 5 (depends on 1)

The integrated structure of claim 1 wherein the gated device has Ion/Ioff characteristics within a factor of five as would occur if the semiconductor material had no metal therein.

### Claim 6 (depends on 1)

The integrated structure of claim 1 wherein the gated device has Ion/Ioff characteristics within a factor of two as would occur if the semiconductor material had no metal therein.

### Claim 7 (depends on 1)

The integrated structure of claim 1 wherein the semiconductor material is silicon.