# US 10,504,818 B2 · Thermally enhanced semiconductor package and process for making the same

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- Number: US 10,504,818 B2
- Document ID: US10504818B2
- Status: Granted
- Kind: B2
- Application number: 16/038,879
- Filed: 2018-07-18
- Published: 2018-11-29
- Granted: 2019-12-10
- Earliest claimed: 2016-12-09
- Assignees: Qorvo US, Inc.
- Applicants: Qorvo US, Inc.
- Inventors: Julio C. Costa; Robert Aigner
- Web page: https://patentgrep.com/patent/US10504818B2

## CPC

- H01L 23/42
- H01L 21/56
- H01L 21/563
- H01L 21/568
- H01L 23/3121
- H01L 23/3135
- H01L 23/367
- H01L 23/3737
- H01L 23/552
- H01L

## Abstract

The present disclosure relates to a thermally enhanced semiconductor package, which includes a module substrate, a thinned flip chip die over the module substrate, a mold compound component, a thermally conductive film, and a thermally enhanced mold compound component. The mold compound component resides over the module substrate, surrounds the thinned flip chip die, and extends above an upper surface of the thinned flip chip die to form a cavity over the upper surface of the thinned flip chip die. The thermally conductive film resides over at least the upper surface of the thinned flip chip at the bottom of the cavity. The thermally enhanced mold compound component resides over at least a portion of the thermally conductive film to fill the cavity.

## Claims

### Claim 1

A method comprising:
providing a precursor package including a module substrate, a thinned flip chip die, and a mold compound component, wherein:
the thinned flip chip die comprises a device layer with electronic components, a dielectric layer over an upper surface of the device layer, and a plurality of interconnects extending from a lower surface of the device layer and coupled to an upper surface of the module substrate;
the mold compound component resides over the upper surface of the module substrate, surrounds the thinned flip chip die, and extends above an upper surface of the thinned flip chip die to form a cavity above the upper surface of the thinned flip chip die; and
the mold compound component is not over the thinned flip chip die;
depositing a thermally conductive film over at least the upper surface of the thinned flip chip die at a bottom of the cavity; and
applying a thermally enhanced mold compound component over at least a portion of the thermally conductive film to fill the cavity.

### Claim 2 (depends on 1)

The method of claim 1 wherein the thinned flip chip die is formed from a silicon on insulator (SOI) structure, wherein the device layer of the thinned flip chip die is formed from a silicon epitaxy layer of the SOI structure, and the dielectric layer of the thinned flip chip die is a buried oxide layer of the SOI structure.

### Claim 3 (depends on 1)

The method of claim 1 further comprising applying a protecting procedure to a lower surface of the module substrate before depositing the thermally conductive film.

### Claim 4 (depends on 1)

The method of claim 1 wherein depositing the thermally conductive film is provided by Chemical Vapor Deposition (CVD) or Atomic Layer Deposition (ALD).

### Claim 5 (depends on 1)

The method of claim 1 wherein providing the precursor package comprises:
providing a semiconductor package including the module substrate, a flip chip die, and the mold compound component over the module substrate and encapsulating the flip chip die, wherein the flip chip die comprises the device layer, the dielectric layer over the upper surface of the device layer, a silicon handle layer over the dielectric layer, and the plurality of interconnects extending from the lower surface of the device layer and coupled to the upper surface of the module substrate;
thinning the mold compound component down to expose a backside of the silicon handle layer of the flip chip die; and
removing substantially the entire silicon handle layer of the flip chip die to provide the thinned flip chip die, wherein the cavity is formed above the thinned flip chip die, and the upper surface of the thinned flip chip die is exposed to the cavity.

### Claim 6 (depends on 5)

The method of claim 5 wherein the flip chip die is formed from a SOI structure, wherein the device layer of the flip chip die is formed from a silicon epitaxy layer of the SOI structure, the dielectric layer of the flip chip die is a buried oxide layer of the SOI structure, and the silicon handler layer of the flip chip die is a silicon handle layer of the SOI structure.

### Claim 7 (depends on 1)

The method of claim 1 wherein the thermally conductive film has a higher thermal conductivity than the thermally enhanced mold compound component.

### Claim 8 (depends on 1)

The method of claim 1 wherein the thermally conductive film has a thermal conductivity between 5 w/m·k and 5000 w/m·k.

### Claim 9 (depends on 1)

The method of claim 1 wherein the thermally conductive film has a thickness between 0.1 μm to 100 μm.

### Claim 10 (depends on 1)

The method of claim 1 wherein the thermally conductive film is formed from CVD diamond.

### Claim 11 (depends on 10)

The method of claim 10 wherein the thermally conductive film has a thickness greater than 1 μm.

### Claim 12 (depends on 1)

The method of claim 1 wherein the thermally conductive film is formed from boron nitride.

### Claim 13 (depends on 12)

The method of claim 12 wherein the thermally conductive film has a thickness between 5 μm and 10 μm.

### Claim 14 (depends on 1)

The method of claim 1 wherein the thermally conductive film is formed from one of a group consisting of aluminum nitride, alumina, and beryllium oxide.

### Claim 15 (depends on 1)

The method of claim 1 wherein the thermally enhanced mold compound component has a thermal conductivity between 2 w/m·k and 20 w/m·k.

### Claim 16 (depends on 1)

The method of claim 1 wherein the thermally conductive film is deposited over exposed surfaces of the cavity and over the mold compound component to thermally connect the module substrate.

### Claim 17 (depends on 1)

The method of claim 1 wherein the thermally enhanced mold compound component is applied over an entirety of the thermally conductive film.

### Claim 18 (depends on 17)

The method of claim 17 further comprising applying a shielding structure to encapsulate the thermally enhanced mold compound component, wherein the shielding structure is in contact with the module substrate.

### Claim 19 (depends on 1)

The method of claim 1 wherein the precursor package further comprises an underfilling layer, which resides between the mold compound component and the upper surface of the module substrate, and underfills the thinned flip chip die between the lower surface of the device layer and the upper surface of the module substrate.

### Claim 20 (depends on 19)

The method of claim 19 wherein the underfilling layer is formed from a same material as the mold compound component.