# US 10,504,781 B2 · Semiconductor structure and method for forming the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,504,781 B2 - Document ID: US10504781B2 - Status: Granted - Kind: B2 - Application number: 15/868,343 - Filed: 2018-01-11 - Published: 2018-05-17 - Granted: 2019-12-10 - Earliest claimed: 2013-12-05 - Assignees: Semiconductor Manufacturing International (Shanghai) Corporation - Applicants: Semiconductor Manufacturing International (Shanghai) Corporation - Inventors: Xianjie Ning - Web page: https://patentgrep.com/patent/US10504781B2 ## CPC - H10W 20/069: {by forming self-aligned vias or self-aligned contact plugs} - H10W 20/056: {by filling conductive material into holes, grooves or trenches} - H10W 20/081: {by forming openings in the dielectric parts} - H10W 20/42: Vias, e.g. via plugs - H10W 20/425: {Barrier, adhesion or liner layers} - H10W 42/00: Arrangements for protection of devices (arrangements for thermal protection H10W40/00) - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract Various embodiments provide semiconductor structures and methods for forming the same. In an exemplary structure, a substrate has a device region, a seal ring region surrounding the device region, and a dielectric layer disposed thereon. A first seal ring structure is located within the dielectric layer on the seal ring region, and includes a plurality of first connection layers overlappingly disposed and separated by the dielectric layer. At least one first connection layer is formed by a plurality of discrete sub-connection layers. The first seal ring structure further includes a plurality of first conductive plugs between vertically adjacent first connection layers. A top of each first conductive plug is connected to an upper first connection layer. A bottom of each first conductive plug between at least two vertically adjacent first connection layers extends into the dielectric layer between horizontally adjacent sub-connection layers of a lower first connection layer. ## Claims ### Claim 1 A method for forming a semiconductor structure, comprising: providing a substrate, wherein the substrate includes a device region and a seal ring region surrounding the device region; forming a first seal ring structure on the seal ring region, the first seal ring structure surrounding the device region, wherein the forming of the first seal ring structure includes: forming a first dielectric layer on the substrate; forming a lower first connection layer in the first dielectric layer, wherein a topmost surface of the lower first connection layer is leveled with a topmost surface of the first dielectric layer, the lower first connection layer includes a plurality of discrete sub-connection layers, and horizontally adjacent sub-connection layers of the plurality of discrete sub-connection layers are separated by the first dielectric layer; and performing a seal-ring-unit forming process including: forming a second dielectric layer on the first dielectric layer and the lower first connection layer; forming, in the second dielectric layer, a plurality of via holes and an opening on top of the plurality of via holes, wherein a bottom of a via hole of the plurality of via holes extends into the first dielectric layer between the horizontally adjacent sub-connection layers; and filling a conductive material in the plurality of via holes and the opening to form a plurality of first conductive plugs in the plurality of via holes and form an upper first connection layer in the opening, such that the lower first connection layer, the plurality of first conductive plugs and the upper first connection layer form the first seal ring structure; and forming a second seal ring structure surrounding the device region between the device region and the first seal ring structure on the seal ring region, wherein the second seal ring structure includes a plurality of second connection layers and a plurality of second conductive plugs directly formed between and connecting each two adjacent second connection layers, each two adjacent second conductive plugs being insulated by the first or the second dielectric layer and each of the plurality of second conductive plugs is in direct contact and electrically connected with two adjacent second connection layers. ### Claim 2 (depends on 1) The method according to claim 1, wherein the plurality of first conductive plugs and the upper first connection layer on the top of the plurality of first conductive plugs are formed simultaneously, such that the upper first connection layer connects more than one of the plurality of first conductive plugs. ### Claim 3 (depends on 1) The method according to claim 1, further including repeatedly performing the seal-ring-unit forming process. ### Claim 4 (depends on 1) The method according to claim 1, wherein a number of the plurality of discrete sub-connection layers forming a first connection layer of the at least one first connection layer ranges from about 1 to about 10. ### Claim 5 (depends on 1) The method according to claim 1, wherein a distance between the horizontally adjacent sub-connection layers ranges from about 0.1 micrometer to about 3 micrometers. ### Claim 6 (depends on 1) The method according to claim 1, wherein a width of each sub-connection layer of the plurality of discrete sub-connection layers ranges from about 0.1 micrometer to about 3 micrometers. ### Claim 7 (depends on 1) The method according to claim 1, wherein a bottom of each sub-connection layer of the plurality of discrete sub-connection layers is connected to at least one first conductive plug, and the each sub-connection layer and the at least one first conductive plug connected to the each sub-connection layer form a seal ring unit. ### Claim 8 (depends on 7) The method according to claim 7, wherein a number of the at least one first conductive plugs connected to the each sub-connection layer ranges from about 1 to about 5. ### Claim 9 (depends on 1) The method according to claim 1, wherein a bottom of a first conductive plug of the plurality of first conductive plugs is connected to a first connection layer of the plurality of first connection layers. ### Claim 10 (depends on 1) The method according to claim 1, wherein: the second seal ring structure surrounds the device region, and the second seal ring structure surrounds the first seal ring structure, or the first seal ring structure surrounds the second seal ring structure. ### Claim 11 (depends on 1) The method according to claim 1, wherein the plurality of first conductive plugs are made of a material containing metal. ### Claim 12 (depends on 1) The method according to claim 1, wherein the plurality of first conductive plugs are made of a material containing copper, tungsten, aluminum, or a combination thereof. ### Claim 13 (depends on 1) The method according to claim 1, wherein the substrate further includes a saw lane region surrounding the seal ring region and the device region. ### Claim 14 (depends on 1) The method according to claim 1, further including: forming a barrier layer at an interface where the first seal ring structure contacts the dielectric layer. ### Claim 15 (depends on 14) The method according to claim 14, wherein the barrier layer is made of titanium, titanium nitride, tantalum, tantalum nitride, or a combination thereof. ### Claim 16 (depends on 1) The method according to claim 1, wherein: each of the plurality of second connection layers has the plurality of second conductive plugs connecting to a bottom surface of the each of the plurality of second connection layers. ### Claim 17 (depends on 1) The method according to claim 1, wherein: the upper first connection layer connects more than one of the plurality of first conductive plugs, the lower first connection layer connects more than one of the plurality of first conductive plugs on a bottom surface of the lower first connection layer, and the lower first connection layer connects more than one of the plurality of first conductive plugs on a top surface of the lower first connection layer. ### Claim 18 A method for forming a semiconductor structure, comprising: providing a substrate, wherein the substrate includes a device region and a seal ring region surrounding the device region; forming a first seal ring structure on the seal ring region, the first seal ring structure surrounding the device region, wherein the forming of the first seal ring structure includes: forming a first dielectric layer on the substrate; forming a lower first connection layer in the first dielectric layer, wherein a topmost surface of the lower first connection layer is leveled with a topmost surface of the first dielectric layer, the lower first connection layer includes a plurality of T-shaped discrete sub-connection layers, and the plurality of T-shaped discrete sub-connection layers are insulated by the first dielectric layer; and performing a seal-ring-unit forming process including: forming a second dielectric layer on the first dielectric layer and the lower first connection layer; forming, in the second dielectric layer, a plurality of via holes and an opening connecting the plurality of via holes, wherein a bottom of a via hole of the plurality of via holes extends into the first dielectric layer between two of the plurality of T-shaped discrete sub-connection layers; and filling a conductive material in the plurality of via holes to form a plurality of first conductive plugs and in the opening to form an upper first connection layer simultaneously, wherein the upper first connection layer connects more than one of the plurality of first conductive plugs; and forming a second seal ring structure surrounding the device region between the device region and the first seal ring structure on the seal ring region, wherein the second seal ring structure includes a plurality of second connection layers and a plurality of second conductive plugs directly formed between and connecting each two adjacent second connection layers, each two adjacent second conductive plugs being insulated by the first or the second dielectric layer and each of the plurality of second conductive plugs is in direct contact and electrically connected with two adjacent second connection layers. ### Claim 19 (depends on 18) The method according to claim 18, wherein: the second seal ring structure surrounds the device region, and the second seal ring structure surrounds the first seal ring structure, or the first seal ring structure surrounds the second seal ring structure.