# US 10,504,699 B2 · Phased array modular high-frequency source > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,504,699 B2 - Document ID: US10504699B2 - Status: Granted - Kind: B2 - Application number: 15/958,569 - Filed: 2018-04-20 - Published: 2019-10-24 - Granted: 2019-12-10 - Earliest claimed: 2018-04-20 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Philip Allan Kraus; Thai Cheng Chua; Christian Amormino; Dmitry A. Dzilno - Web page: https://patentgrep.com/patent/US10504699B2 ## CPC - H01J 37/32201: {Generating means} - H01J 37/32229: {Waveguides} - H01Q 3/34: by electrical means (active lenses or reflecting arrays H01Q3/46) - H01Q 21/0025: {Modular arrays} - H03B 5/24: active element in amplifier being semiconductor device (H03B5/26 takes precedence) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H01Q: ANTENNAS, i.e. RADIO AERIALS (radiators or antennas for microwave heating H05B6/72) - H03B: GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS (generators adapted for electrophonic musical instruments G10H; masers or lasers H01S; generation of oscillations in plasma H05H) ## Abstract Embodiments described herein include a modular high-frequency emission source comprising a plurality of high-frequency emission modules and a phase controller. In an embodiment, each high-frequency emission module comprises an oscillator module, an amplification module, and an applicator. In an embodiment, each oscillator module comprises a voltage control circuit and a voltage controlled oscillator. In an embodiment, each amplification module is coupled to an oscillator module, in an embodiment, each applicator is coupled to an amplification module. In an embodiment, the phase controller is communicatively coupled to each oscillator module. ## Claims ### Claim 1 A modular high-frequency emission source, comprising: a plurality of high-frequency emission modules, wherein each high-frequency emission module comprises: an oscillator module, wherein each oscillator module comprises: a voltage control circuit; and a voltage controlled oscillator; an amplification module, wherein the amplification module is coupled the oscillator module; an applicator, wherein the applicator is coupled to the amplification module; and a phase controller communicatively coupled to each oscillator module. ### Claim 2 (depends on 1) The modular high-frequency emission source of claim 1, wherein the applicator of each high-frequency emission module is part of a phased array. ### Claim 3 (depends on 2) The modular high-frequency emission source of claim 2, wherein the phase controller controls a phase relationship of electromagnetic radiation generated by the oscillator modules in order to form an electromagnetic radiation pattern emitted by the phased array. ### Claim 4 (depends on 3) The modular high-frequency emission source of claim 3, wherein the electromagnetic radiation pattern is a static pattern. ### Claim 5 (depends on 3) The modular high-frequency emission source of claim 3, wherein the electromagnetic radiation pattern is a dynamic pattern. ### Claim 6 (depends on 1) The modular high-frequency emission source of claim 1, wherein the high-frequency is a microwave frequency. ### Claim 7 (depends on 1) The modular high-frequency emission source of claim 1, wherein the high-frequency is 0.1 MHz to 300 GHz. ### Claim 8 A modular high-frequency emission source, comprising: a plurality of high-frequency emission modules, wherein each high-frequency emission module comprises: an oscillator module, wherein the oscillator module comprises: a voltage control circuit; and a voltage controlled oscillator, wherein an output voltage from the voltage control circuit drives oscillation in the voltage controlled oscillator to generate an output high-frequency electromagnetic radiation; an amplification module, wherein the amplification module is coupled to the oscillator module, wherein the amplification module amplifies the output high-frequency electromagnetic radiation from the voltage controlled oscillator; an applicator, wherein the applicator is coupled to the amplification module; and a phase controller communicatively coupled to each of the oscillator modules, wherein the phase controller controls a phase relationship of the output high-frequency electromagnetic radiation generated by each of the oscillator modules. ### Claim 9 (depends on 8) The modular high-frequency emission source of claim 8, wherein the output high-frequency electromagnetic radiation excites a plasma. ### Claim 10 (depends on 8) The modular high-frequency emission source of claim 8, wherein the applicator of each high-frequency emission module is part of a phased array. ### Claim 11 (depends on 10) The modular high-frequency emission source of claim 10, wherein the phase controller generates an electromagnetic pattern emitted by the phased array. ### Claim 12 (depends on 11) The modular high-frequency emission source of claim 11, wherein the electromagnetic radiation pattern is a static pattern. ### Claim 13 (depends on 11) The modular high-frequency emission source of claim 11, wherein the electromagnetic radiation pattern is a dynamic pattern. ### Claim 14 (depends on 8) The modular high-frequency emission source of claim 8, wherein the high-frequency is a microwave frequency. ### Claim 15 A processing tool, comprising: a processing chamber; and a modular high-frequency emission source, comprising: a plurality of high-frequency emission modules, wherein each high-frequency emission module comprises: an oscillator module, wherein each oscillator module comprises: a voltage control circuit; and a voltage controlled oscillator; an amplification module, wherein the amplification module is coupled to the oscillator module; and an applicator, wherein the applicator is coupled to the amplification module, and wherein the applicator is positioned opposing a chuck in the processing chamber on which one or more substrates are processed; and a phase controller communicatively coupled to each oscillator module. ### Claim 16 (depends on 15) The processing tool of claim 15, wherein the applicator of each high-frequency emission module is part of a phased array. ### Claim 17 (depends on 16) The processing tool of claim 16, wherein the phase controller controls a phase relationship of electromagnetic radiation generated by the oscillator modules in order to form an electromagnetic radiation pattern emitted by the phased array. ### Claim 18 (depends on 17) The processing tool of claim 17, wherein the electromagnetic radiation excites a plasma. ### Claim 19 (depends on 17) The processing tool of claim 17, wherein the electromagnetic radiation pattern is a dynamic pattern. ### Claim 20 (depends on 15) The processing tool of claim 15, wherein the high-frequency is a microwave frequency.