# US 10,504,694 B2 · Scanning electron microscope and method of use thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,504,694 B2 - Document ID: US10504694B2 - Status: Granted - Kind: B2 - Application number: 15/601,547 - Filed: 2017-05-22 - Published: 2017-11-23 - Granted: 2019-12-10 - Earliest claimed: 2016-05-21 - Assignees: TESCAN Brno, s.r.o. - Applicants: TESCAN Brno, s.r.o. - Inventors: Jaroslav Jiruse; Filip Lopour; Milos Havelka; Jan Polster; Josef Rysavka; Martin Zadrazil - Web page: https://patentgrep.com/patent/US10504694B2 ## CPC - H01J 37/263: {Contrast, resolution or power of penetration} - H01J 37/04: Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement {(H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007)} - H01J 37/12: electrostatic - H01J 37/141: Electromagnetic lenses - H01J 37/1475: {magnetic} - H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} - H01J 2237/04922: electromagnetic - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A scanning electron microscope comprises three objective lenses, including a distant objective lens and a close objective lens, which are of conventional type, and an immersion objective lens of the immersion type below the distant objective lens and the close objective lens. These three objective lenses can be controlled independently, therefor different combinations of active objective lenses can be achieved. The scanning electron microscope therefore offers various imaging modes. There is a possibility to switch between these imaging modes and therefore, choose the most suitable way of imaging for given application. ## Claims ### Claim 1 A scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, and a close objective lens arranged between the distant objective lens and the immersion objective lens, wherein the objective lenses are configured to be controlled to cause at least one of the objective lenses to be active while at least another one of the objective lenses in inactive. ### Claim 2 (depends on 1) The scanning electron microscope according to claim 1, wherein any lens from the group consisting of the at least one condenser lens, the distant objective lens and the close objective lens is electromagnetic. ### Claim 3 (depends on 1) The scanning electron microscope according to claim 1, wherein any lens from the group consisting of the at least one condenser lens, the distant objective lens and the close objective lens is electrostatic. ### Claim 4 (depends on 1) The scanning electron microscope according to claim 1, wherein the immersion objective lens is a single polepiece lens. ### Claim 5 (depends on 1) The scanning electron microscope according to claim 1, wherein the immersion objective lens is a double polepiece lens. ### Claim 6 (depends on 1) The scanning electron microscope according to claim 1, wherein the sample holder is modified for applying voltage onto the sample. ### Claim 7 (depends on 1) The scanning electron microscope according to claim 1, wherein the scanning coils are arranged above the close objective lens. ### Claim 8 (depends on 7) The scanning electron microscope according to claim 7, wherein the scanning coils are arranged above the distant objective lens. ### Claim 9 (depends on 1) The scanning electron microscope according to claim 1, wherein the scanning coils are arranged below the close objective lens. ### Claim 10 (depends on 1) The scanning electron microscope according to claim 1, further comprising a device utilizing focused ion beam. ### Claim 11 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, comprising the step of: rendering at least one of the objective lenses active while at least another one of the objective lenses is inactive. ### Claim 12 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, and a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of: rendering the at least one condenser lens active in such a way that the primary electrons do not create a real crossover between the at least one condenser lens and the immersion objective lens, and rendering the immersion objective lens inactive while activating the distant objective lens. ### Claim 13 (depends on 12) The method of use of the scanning electron microscope according to claim 12, wherein the close objective lens is inactive. ### Claim 14 (depends on 11) The method of use of the scanning electron microscope according to claim 11, further comprising the step wherein the immersion objective lens is activated. ### Claim 15 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of: rendering the at least one condenser lens active in such a way that the primary electrons do not create a real crossover between the at least one condenser lens and the immersion objective lens, wherein the immersion objective lens is activated, and wherein the distant objective lens is inactive and the close objective lens is inactive. ### Claim 16 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of: rendering the at least one condenser lens active in such a way that the primary electrons do not create a real crossover between the at least one condenser lens and the immersion objective lens, wherein the immersion objective lens is activated, and wherein the distant objective lens is active and the close objective lens is inactive. ### Claim 17 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of: rendering the at least one condenser lens active in such a way that the primary electrons do not create a real crossover between the at least one condenser lens and the immersion objective lens, wherein the immersion objective lens is activated, wherein the distant objective lens is inactive and the close objective lens is active. ### Claim 18 (depends on 14) The method of use of the scanning electron microscope according to claim 14, wherein the distant objective lens is active and the close objective lens is active. ### Claim 19 A method of use of a scanning electron microscope comprising a source of primary electrons, at least one condenser lens, an aperture diaphragm, scanning coils, at least one detector of signal electrons, a sample holder, a distant objective lens arranged between the at least one condenser lens and the sample holder, an immersion objective lens arranged between the distant objective lens and the sample holder, characterized in that it further comprises a close objective lens arranged between the distant objective lens and the immersion objective lens, the method comprising the steps of: rendering the at least one condenser lens active in such a way that the primary electrons do not create a real crossover between the at least one condenser lens and the immersion objective lens, wherein the immersion objective lens is activated, and rendering the immersion objective lens inactive and activating the close objective lens. ### Claim 20 (depends on 19) The method of use of the scanning electron microscope according to claim 19, wherein the distant objective lens is inactive. ### Claim 21 (depends on 19) The method of use of the scanning electron microscope according to claim 19, wherein the distant objective lens is active. ### Claim 22 (depends on 1) The scanning electron microscope according to claim 1, wherein the at least one condenser lens, the sample holder, the distant objective lens, the immersion objective lens and the close objective lens are linearly arranged with spacing therebetween. ### Claim 23 (depends on 1) The scanning electron microscope according to claim 1, wherein the at least one condenser lens, the sample holder, the distant objective lens, the immersion objective lens and the close objective lens are axially arranged with spacing therebetween. ### Claim 24 (depends on 1) The scanning electron microscope according to claim 1, wherein the distant objective lens is arranged entirely between the at least one condenser lens and the sample holder, the immersion objective lens is arranged entirely between the distant objective lens and the sample holder, and the close objective lens is arranged entirely between the distant objective lens and the immersion objective lens. ### Claim 25 (depends on 1) The scanning electron microscope according to claim 1, wherein the scanning coil is configured to scan the primary electrons in relation to a surface of a sample.