# US 10,504,420 B2 · Display device and electronic device

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- Number: US 10,504,420 B2
- Document ID: US10504420B2
- Status: Granted
- Kind: B2
- Application number: 15/725,468
- Filed: 2017-10-05
- Published: 2018-04-12
- Granted: 2019-12-10
- Earliest claimed: 2016-10-07
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Applicants: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Masahiro Katayama; Daisuke Kurosaki; Kenichi Okazaki; Junichi Koezuka
- Web page: https://patentgrep.com/patent/US10504420B2

## CPC

- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- G09G 3/30: using electroluminescent panels
- H10D 30/6729: {characterised by the electrodes}
- H10D 30/6755: {Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate}
- H10D 30/6756: {Amorphous oxide semiconductors}
- H10D 30/6757: {characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715)}
- H10D 86/0231: {using masks, e.g. half-tone masks}
- H10D 86/60: wherein the TFTs are in active matrices
- H10D 99/00: Subject matter not provided for in other groups of this subclass
- H10K 59/1213: {the pixel elements being TFTs}
- H10K 59/131: Interconnections, e.g. wiring lines or terminals
- G09G 3/3659: {the addressing of the pixel involving the control of two or more scan electrodes or two or more data electrodes, e.g. pixel voltage dependant on signal of two data electrodes}
- G09G 3/3677: {suitable for active matrices only}
- G09G 3/3688: {suitable for active matrices only}
- G09G 2330/021: Power management, e.g. power saving
- H10K 59/12: Active-matrix OLED [AMOLED] displays
- H10K 59/1201: {Manufacture or treatment}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G09G: ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION (arrangements for transferring data between digital computers and displays G06F3/14; static indicating arrangements comprising an association of a number of separate sources or light control cells G09F9/00; static indicating arrangements comprising integral associations of a number of light sources H01J, H01K, H10H, H05B33/12; scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission, details thereof H04N1/00)
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

The number of lithography processes is reduced and a high-definition display device is provided. The display device includes a pixel portion and a driver circuit for driving the pixel portion. The pixel portion includes a first transistor and a pixel electrode electrically connected to the first transistor. The driver circuit includes a second transistor and a connection portion. The second transistor includes a metal oxide film, first and second gate electrodes that face each other with the metal oxide film positioned therebetween, source and drain electrodes over and in contact with the metal oxide film, and a first wiring connecting the first and second gate electrodes. The connection portion includes a second wiring on the same surface as the first gate electrode, a third wiring on the same surface as the source electrode and the drain electrode, and a fourth wiring connecting the second wiring and the third wiring. The pixel electrode, the first wiring, and the fourth wiring are formed using the same layer.

## Claims

### Claim 1

A display device comprising:
a pixel portion; and
a driver circuit for driving the pixel portion,
wherein the pixel portion comprises:
a first transistor; and
a pixel electrode electrically connected to the first transistor,
wherein the driver circuit comprises:
a second transistor; and
a connection portion,
wherein the second transistor comprises:
a metal oxide film;
a first gate electrode and a second gate electrode that face each other with the metal oxide film positioned therebetween;
a source electrode and a drain electrode over and in contact with the metal oxide film; and
a first wiring connecting the first gate electrode and the second gate electrode,
wherein end portions of the metal oxide film extend beyond an outer end portion of the source electrode and an outer end portion of the drain electrode,
wherein the connection portion comprises:
a second wiring on the same surface as the first gate electrode;
a third wiring on the same surface as the source electrode and the drain electrode; and
a fourth wiring connecting the second wiring and the third wiring, and
wherein the pixel electrode, the first wiring, and the fourth wiring comprise a same layer.

### Claim 2 (depends on 1)

The display device according to claim 1, further comprising:
a first insulating film having a flat top surface between the first transistor and the pixel electrode;
a second insulating film having a flat top surface between the second transistor and the first wiring; and
a third insulating film having a flat top surface between the fourth wiring and each of the second wiring and the third wiring.

### Claim 3 (depends on 1)

The display device according to claim 1, wherein the metal oxide film comprises a first metal oxide layer and a second metal oxide layer on the first metal oxide layer.

### Claim 4 (depends on 1)

The display device according to claim 1, wherein the metal oxide film comprises indium, zinc, and oxygen.

### Claim 5 (depends on 4)

The display device according to claim 4, wherein the metal oxide film further comprises an element M that is one or more of gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

### Claim 6 (depends on 5)

The display device according to claim 5, wherein the metal oxide film comprises:
a region where an indium content accounts for 40% or higher and 50% or lower of a total sum of indium, element M, and zinc atoms; and
a region where an element M content accounts for 5% or higher and 30% or lower of the total sum of indium, element M, and zinc atoms.

### Claim 7 (depends on 5)

The display device according to claim 5, wherein an atomic ratio of indium to the element M and zinc is 4:x:y in the metal oxide film, where x is greater than or equal to 1.5 and less than or equal to 2.5 and y is greater than or equal to 2 and less than or equal to 4.

### Claim 8 (depends on 1)

An electronic device comprising:
the display device according to claim 1; and
a receiver.

### Claim 9

A display device comprising:
a pixel portion; and
a driver circuit for driving the pixel portion,
wherein the pixel portion comprises:
a first transistor; and
a pixel electrode electrically connected to the first transistor,
wherein the driver circuit comprises:
a second transistor; and
a connection portion,
wherein the second transistor comprises:
a metal oxide film;
a gate electrode in a region overlapping with the metal oxide film; and
a source electrode and a drain electrode over and in contact with the metal oxide film,
wherein an outer end portion of the source electrode and an outer end portion of the drain electrode are inward from end portions of the metal oxide film,
wherein the connection portion comprises:
a first wiring on the same surface as the gate electrode;
a second wiring on the same surface as the source electrode and the drain electrode; and
a third wiring connecting the first wiring and the second wiring, and
wherein the pixel electrode and the third wiring comprise a same layer.

### Claim 10 (depends on 9)

The display device according to claim 9, further comprising:
a first insulating film having a flat top surface between the first transistor and the pixel electrode; and
a third insulating film having a flat top surface between the third wiring and each of the first wiring and the second wiring.

### Claim 11 (depends on 9)

The display device according to claim 9, wherein the metal oxide film comprises a first metal oxide layer and a second metal oxide layer on the first metal oxide layer.

### Claim 12 (depends on 9)

The display device according to claim 9, wherein the metal oxide film comprises indium, zinc, and oxygen.

### Claim 13 (depends on 12)

The display device according to claim 12, wherein the metal oxide film further comprises an element M that is one or more of gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

### Claim 14 (depends on 13)

The display device according to claim 13, wherein the metal oxide film comprises:
a region where an indium content accounts for 40% or higher and 50% or lower of a total sum of indium, element M, and zinc atoms; and
a region where an element M content accounts for 5% or higher and 30% or lower of the total sum of indium, element M, and zinc atoms.

### Claim 15 (depends on 13)

The display device according to claim 13, wherein an atomic ratio of indium to the element M and zinc is 4:x:y in the metal oxide film, where x is greater than or equal to 1.5 and less than or equal to 2.5 and y is greater than or equal to 2 and less than or equal to 4.

### Claim 16 (depends on 9)

An electronic device comprising:
the display device according to claim 9; and
a receiver.

### Claim 17

A display device comprising:
a pixel portion; and
a driver circuit for driving the pixel portion,
wherein the pixel portion comprises:
a first transistor; and
a pixel electrode electrically connected to the first transistor,
wherein the driver circuit comprises:
a second transistor; and
a connection portion,
wherein the second transistor comprises:
a metal oxide film;
a first gate electrode and a second gate electrode that face each other with the metal oxide film positioned therebetween; and
a source electrode and a drain electrode over and in contact with the metal oxide film,
wherein end portions of the source electrode and end portions of the drain electrode do not extend beyond end portions of the metal oxide film,
wherein the connection portion comprises:
a first wiring; and
a second wiring over the first wiring,
wherein the first gate electrode and the second gate electrode are electrically connected to each other,
wherein the first wiring is on the same surface as the first gate electrode,
wherein the second wiring is on the same surface as the source electrode and the drain electrode, and
wherein the pixel electrode and the second gate electrode comprise a same layer.

### Claim 18 (depends on 17)

The display device according to claim 17, further comprising:
a first insulating film having a flat top surface between the first transistor and the pixel electrode; and
a second insulating film having a flat top surface between the metal oxide film and the second gate electrode.

### Claim 19 (depends on 17)

The display device according to claim 17, wherein the metal oxide film comprises a first metal oxide layer and a second metal oxide layer on the first metal oxide layer.

### Claim 20 (depends on 17)

The display device according to claim 17, wherein the metal oxide film comprises indium, zinc, and oxygen.

### Claim 21 (depends on 20)

The display device according to claim 20, wherein the metal oxide film further comprises an element M that is one or more of gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

### Claim 22 (depends on 21)

The display device according to claim 21, wherein the metal oxide film comprises:
a region where an indium content accounts for 40% or higher and 50% or lower of a total sum of indium, element M, and zinc atoms; and
a region where an element M content accounts for 5% or higher and 30% or lower of the total sum of indium, element M, and zinc atoms.

### Claim 23 (depends on 21)

The display device according to claim 21, wherein an atomic ratio of indium to the element M and zinc is 4:x:y in the metal oxide film, where x is greater than or equal to 1.5 and less than or equal to 2.5 and y is greater than or equal to 2 and less than or equal to 4.

### Claim 24 (depends on 17)

An electronic device comprising:
the display device according to claim 17; and
a receiver.

### Claim 25

A display device comprising:
a pixel portion; and
a driver circuit for driving the pixel portion,
wherein the pixel portion comprises:
a first transistor; and
a pixel electrode electrically connected to the first transistor,
wherein the driver circuit comprises:
a second transistor; and
a connection portion,
wherein the second transistor comprises:
a metal oxide film;
a gate electrode in a region overlapping with the metal oxide film; and
a source electrode and a drain electrode over and in contact with the metal oxide film,
wherein the whole of the source electrode and the drain electrode overlaps with the metal oxide film,
wherein the connection portion comprises:
a first wiring; and
a second wiring over the first wiring,
wherein the first wiring is on the same surface as the gate electrode, and
wherein the second wiring is on the same surface as the source electrode and the drain electrode.

### Claim 26 (depends on 25)

The display device according to claim 25, further comprising a first insulating film having a flat top surface between the first transistor and the pixel electrode.

### Claim 27 (depends on 25)

The display device according to claim 25, wherein the metal oxide film comprises a first metal oxide layer and a second metal oxide layer on the first metal oxide layer.

### Claim 28 (depends on 25)

The display device according to claim 25, wherein the metal oxide film comprises indium, zinc, and oxygen.

### Claim 29 (depends on 28)

The display device according to claim 28, wherein the metal oxide film further comprises an element M that is one or more of gallium, aluminum, silicon, boron, yttrium, tin, copper, vanadium, beryllium, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, and magnesium.

### Claim 30 (depends on 29)

The display device according to claim 29, wherein the metal oxide film comprises:
a region where an indium content accounts for 40% or higher and 50% or lower of a total sum of indium, element M, and zinc atoms; and
a region where an element M content accounts for 5% or higher and 30% or lower of the total sum of indium, element M, and zinc atoms.

### Claim 31 (depends on 29)

The display device according to claim 29, wherein an atomic ratio of indium to the element M and zinc is 4:x:y in the metal oxide film, where x is greater than or equal to 1.5 and less than or equal to 2.5 and y is greater than or equal to 2 and less than or equal to 4.

### Claim 32 (depends on 25)

An electronic device comprising:
the display device according to claim 25; and
a receiver.