# US 10,503,178 B2 · System for and method of monitoring flow through mass flow controllers in real time

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,503,178 B2
- Document ID: US10503178B2
- Status: Granted
- Kind: B2
- Application number: 15/419,047
- Filed: 2017-01-30
- Published: 2017-07-13
- Granted: 2019-12-10
- Earliest claimed: 2012-01-20
- Assignees: MKS Instruments, Inc.
- Applicants: MKS Instruments, Inc.
- Inventors: Junhua Ding
- Web page: https://patentgrep.com/patent/US10503178B2

## CPC

- G05D 7/0635: {by action on throttling means (G05D7/0688, G05D7/0694 take precedence)}
- G01F 1/88: with differential-pressure measurement to determine the volume flow
- G01F 15/002: {for gases}
- G01F 15/005: {Valves (valves in general F16K)}
- G01F 25/003
- G01F 25/0053
- Y10T 137/776: Control by pressures across flow line valve
- G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G01F: MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.

## Claims

### Claim 1

A mass flow controller comprising:
a first, thermal mass flow meter operative to measure flow rate of mass of gas through the mass flow controller in real time during the running of a process, and to produce a first flow measurement signal representing a measured flow rate through the mass flow controller;
a differential pressure flow meter including (i) a flow restrictor disposed in a flow path of the mass flow controller, (ii) a pressure sensor operative to sense pressure in the flow path of the mass flow controller upstream of the flow restrictor, and (iii) a temperature sensor operative to sense temperature of the flow path upstream of the flow restrictor;
wherein the differential pressure flow meter is operative to measure flow rate of mass of gas through the mass flow controller, and to produce as an output a second flow measurement signal based on data from the pressure sensor and the temperature sensor;
a control valve disposed between the first, thermal mass flow meter and the differential pressure flow meter, with the first, thermal mass flow meter upstream of the control valve and the differential pressure flow meter downstream of the control valve, the control valve operative to control the flow rate of mass of gas through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters during the running of the process; and
a system controller operative to receive the first and second flow measurement signals produced by the first and differential pressure flow meters, respectively, and to generate the control signal, and to provide an alarm signal indicating when a difference between the first and second flow measurement signals exceeds a predetermined threshold.

### Claim 2 (depends on 1)

The mass flow controller of claim 1, where the differential pressure flow meter is configured to have a second pressure sensor operative to sense pressure in the flow path downstream of the flow restrictor, and to measure flow rate of mass of gas through the mass flow controller under both choked and unchoked flow conditions during the running of the process.

### Claim 3 (depends on 1)

The mass flow controller of claim 1, wherein the control signal is generated as a function of the flow rate as measured by the first flow meter.

### Claim 4 (depends on 1)

The mass flow controller of claim 1, wherein the control signal is generated as a function of the flow rate as measured by the differential pressure flow meter.

### Claim 5 (depends on 1)

The mass flow controller of claim 1, wherein the threshold is user set.

### Claim 6 (depends on 1)

The mass flow controller of claim 1, wherein the threshold is factory set.

### Claim 7 (depends on 1)

The mass flow controller of claim 1, wherein the threshold is set as a function of permissible tolerance in mass flow for the process with which the controller is used to deliver gas.

### Claim 8 (depends on 1)

The mass flow controller of claim 1, wherein the flow restrictor comprises a critical flow nozzle.

### Claim 9 (depends on 1)

The mass flow controller of claim 1, wherein the flow restrictor comprises an orifice.