# US 10,503,127 B2 · Method for safe control of gas delivery to an electron microscope sample holder > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,503,127 B2 - Document ID: US10503127B2 - Status: Granted - Kind: B2 - Application number: 15/919,575 - Filed: 2018-03-13 - Published: 2018-07-19 - Granted: 2019-12-10 - Earliest claimed: 2014-08-03 - Assignees: Protochips, Inc. - Applicants: Protochips, Inc. - Inventors: Daniel S. Gardiner; John Damiano, Jr.; David P. Nackashi; William Bradford Carpenter; James Rivenbark; Mark Uebel; Michael Zapata, III; Rebecca Thomas; Franklin Stampley Walden, II - Web page: https://patentgrep.com/patent/US10503127B2 ## CPC - G05B 9/02: electric - G01M 3/3272: {for verifying the internal pressure of closed containers} - G05D 7/0635: {by action on throttling means (G05D7/0688, G05D7/0694 take precedence)} - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 37/18: Vacuum locks {; Means for obtaining or maintaining the desired pressure within the vessel} - H01J 2237/006: Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608) - H01J 2237/182: Obtaining or maintaining desired pressure - H01J 2237/2002: Controlling environment of sample - H01J 2237/2007: Holding mechanisms - H01J 2237/2802: Transmission microscopes - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - G01M: TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract System and method for safely controlling the containment of gas within a manifold system and the delivery of gas to a sample holder for an electron microscope for imaging and analysis. ## Claims ### Claim 1 A system comprising: an electron microscope sample holder having a cell; and a gas delivery system comprising: a gas source device configured for fluid communication with the cell; a gas destination device configured for fluid communication with the cell; a pressure sensor configured for fluid communication with at least one of the cell, the gas source device, and the gas destination device; at least one valve; an intermediary valve between the at least one valve and an inlet port; and a controller configured for monitoring the pressure sensor and signaling control of the valve. ### Claim 2 (depends on 1) The system of claim 1, further comprising a mass flow controller. ### Claim 3 (depends on 1) The system of claim 1, wherein the gas source device comprises a tank. ### Claim 4 (depends on 1) The system of claim 1, wherein the gas destination device comprises at least one of a tank and a pump. ### Claim 5 (depends on 1) The system of claim 1, wherein: the at least one valve closes when not electrically activated. ### Claim 6 (depends on 1) The system of claim 1, wherein the pressure sensor is between the gas source device and the at least one valve. ### Claim 7 (depends on 6) The system of claim 6, further comprising a second valve and a second pressure sensor, wherein a second pressure sensor is between the gas destination device and the second valve. ### Claim 8 (depends on 1) The system of claim 1, wherein upon a decrease in pressure at the at least one pressure sensor, the controller signals closure of the at least one valve. ### Claim 9 (depends on 1) The system of claim 1, wherein upon a decrease in pressure at the at least one pressure sensor or a second pressure sensor, the controller signals closure of the at least one valve or the intermediary valve to prevent leakage from the system into an atmosphere environment. ### Claim 10 (depends on 1) The system of claim 1, further comprising a communication and switching bus by which the controller commands the at least one valve to be opened or closed. ### Claim 11 (depends on 10) The system of claim 10, wherein: the at least one valve closes when not electrically-activated by the controller; and a second valve closes when not electrically-activated by the controller. ### Claim 12 (depends on 11) The system of claim 11, further comprising an emergency stop device, wherein: the at least one valve closes when not activated by electrical power; the second valve closes when not activated by electrical power; and electrical power is removed from the at least one valve and second valve when the emergency stop device is activated. ### Claim 13 (depends on 12) The system of claim 12, wherein upon an increase in pressure of at least one of the at least one pressure sensor, and a second pressure sensor, the controller signals closure of the at least one valve and a second valve to prevent leakage from an atmosphere into the system. ### Claim 14 (depends on 13) The system of claim 13, wherein upon a decrease in pressure of at least one of the at least one pressure sensor and the second pressure sensor, the controller signals closure of the at least one valve and the second valve to prevent leakage from the system into an electron microscope. ### Claim 15 (depends on 1) The system of claim 1, wherein the gas destination device comprises a pump.