# US 10,503,062 B2 · Multi-tone amplitude photomask > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,503,062 B2 - Document ID: US10503062B2 - Status: Granted - Kind: B2 - Application number: 16/442,244 - Filed: 2019-06-14 - Published: 2019-10-03 - Granted: 2019-12-10 - Earliest claimed: 2015-01-05 - Assignees: Marsupial Holdings, Inc. - Applicants: Marsupial Holdings, Inc. - Inventors: William P. Parker; Julie Parker - Web page: https://patentgrep.com/patent/US10503062B2 ## CPC - B05B 1/00: Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means (B05B3/00, B05B5/00, B05B7/00 take precedence; devices for applying liquids or other fluent materials to surfaces by contact B05C; nozzles for ink-jet printing mechanisms B41J2/135; nozzles for liquid-dispensing, e.g. in vehicle service stations, B67D7/42) - G03F 1/80: Etching - G03F 1/22: Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof - G03F 1/50: Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof - G03F 1/68: Preparation processes not covered by groups G03F1/20 - G03F1/50 - G03F 7/0005: {Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor} - G03F 7/2004: {characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light} - G03F 7/36: Imagewise removal not covered by groups G03F7/30 - G03F7/34, e.g. using gas streams, using plasma - B05B: SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES (spray-mixers with nozzles B01F25/72; processes for applying liquids or other fluent materials to surfaces by spraying B05D) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A method of fabricating a multi-tone amplitude photomask includes providing a mask substrate. The method includes providing a stepped pattern in at least one layer of material on a surface of the mask substrate. The stepped pattern includes at least two steps and at least three levels. Each level of the stepped pattern provides a different intensity of light when a light source shines light on the stepped pattern. ## Claims ### Claim 1 A method of fabricating a multi-tone amplitude photomask, comprising a. providing a mask substrate; and b. providing a pattern on a surface of the mask substrate, wherein the pattern defines a channel and includes at least three layers of material, wherein each layer of material provides a different intensity of light when a light source shines light on the pattern. ### Claim 2 (depends on 1) A method as recited in claim 1, wherein the providing a pattern includes providing a layer of a polymer on the mask substrate and ablating or etching the layer of polymer to form a pattern in the polymer wherein the pattern in the polymer includes a first portion having a first thickness and a second portion having a second thickness. ### Claim 3 (depends on 2) A method as recited in claim 2, wherein the ablating includes laser ablating with a scanning laser. ### Claim 4 (depends on 2) A method as recited in claim 2, wherein the ablating includes ablating with a holographic mask. ### Claim 5 (depends on 2) A method as recited in claim 2, wherein the etching includes plasma etching or reactive ion etching through a mask. ### Claim 6 (depends on 1) A method as recited in claim 1, wherein the providing a pattern includes additively providing patterned layers of polymer on the mask substrate to provide the pattern. ### Claim 7 (depends on 1) A method as recited in claim 1, wherein the providing a pattern includes: a. providing a first blanket layer of material on the mask substrate; b. providing a second blanket layer of material on the first blanket layer of material; and c. etching the first blanket layer and the second blanket layer to form the pattern including a first pattern in the first layer and a second pattern in the second layer wherein the pattern includes a first region having none of the first layer and none of the second layer, a second region having the first layer and none of the second layer, and a third region having both the first layer and the second layer. ### Claim 8 (depends on 1) A method as recited in claim 1, wherein the providing the pattern on the surface of the mask substrate includes: a. providing at least one material on the surface of the mask substrate; b. providing a first resist on the at least one material wherein a first opening in the resist extends completely through the first resist and wherein the first opening includes a first region along the surface; c. etching a first etched pattern in the at least one material defined by the first opening wherein the first etched pattern extends only part way through the at least one material and leaving a remaining portion of the at least one material; d. providing a second resist on the at least one material wherein a second opening in the second resist extends completely through the second resist, wherein the second opening extends above the first region; and e. etching a second etched pattern in the at least one material defined by the second opening wherein the second etched pattern extends at least partially through a remaining portion of the at least one material to provide the pattern in the at least one material on the mask substrate, wherein the second etch pattern is aligned to the first etch pattern. ### Claim 9 (depends on 8) A method as recited in claim 8, wherein the at least one material includes a first material and a second material, wherein the first material has a first etch characteristic and the second material has a second etch characteristic, wherein the first etch characteristic is different from the second etch characteristic, wherein the first and the second etch characteristics allow in etching (c) etching all the way through the first material without substantially etching the second material, and etching all the way through the first material without substantially etching the second material. ### Claim 10 (depends on 9) A method as recited in claim 9, wherein the etching (e) involves etching all the way through the second material without etching the mask substrate. ### Claim 11 (depends on 9) A method as recited in claim 9, further comprising: a. providing a workpiece; b. providing photoresist on the workpiece; c. providing a dose of light to the pattern on the surface of the mask substrate to expose the photoresist on the workpiece; d. developing to form a stepped pattern in the photoresist on the workpiece based on the different levels of intensity of light when measured at the mask and when a light source shines light on the pattern, wherein after the developing, no photoresist exists on the workpiece surface in the second etched pattern, wherein a first thickness of photoresist extends above the workpiece surface between the second etched pattern and the first etched pattern, and wherein a second thickness of photoresist extends above the workpiece surface beyond the first etched pattern, wherein the second thickness is greater than the first thickness. ### Claim 12 (depends on 11) A method as recited in claim 11, further comprising transferring the pattern in the photoresist on the workpiece into a device. ### Claim 13 A method of fabricating a multi-tone amplitude photomask comprising: a. providing a mask substrate; and b. providing a channel on top of the substrate, wherein the channel is formed from a plurality of layers of material, wherein each layer has an optical density that depends on the material characteristic and layer thickness. ### Claim 14 (depends on 13) A method according to claim 13, wherein the channel has rounded edges. ### Claim 15 (depends on 13) A method according to claim 13, wherein a second channel is arranged above and substantially orthogonal to the channel. ### Claim 16 (depends on 13) A method according to claim 13, wherein the channel has curved sidewalls. ### Claim 17 (depends on 13) A method according to claim 13, wherein one of the plurality of layers of material is an etch stop layer. ### Claim 18 (depends on 17) A method according to claim 17, further including etching away the etch stop layer to form openings in the etch stop layer. ### Claim 19 (depends on 13) A method according to claim 13, wherein the channel is sized and configured to carry a liquid. ### Claim 20 (depends on 13) A multi-tone amplitude photomask manufactured by the method of claim 13.