# US 10,503,047 B2 · Optomechanical doubly resonant 2D frequency doubling devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,503,047 B2 - Document ID: US10503047B2 - Status: Granted - Kind: B2 - Application number: 15/580,537 - Filed: 2016-06-09 - Published: 2018-08-30 - Granted: 2019-12-10 - Earliest claimed: 2015-06-09 - Assignees: The Trustees of the University of Pennsylvania - Applicants: The Trustees of the University of Pennsylvania - Inventors: Ertugrul Cubukcu; Fei Yi - Web page: https://patentgrep.com/patent/US10503047B2 ## CPC - G02F 1/3501: {Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals} - G02B 26/002: {the movement or the deformation controlling the frequency of light, e.g. by Doppler effect} - G02F 1/355: characterised by the materials used - G02F 1/3613: {containing Sulfur} - G02F 1/37: for second-harmonic generation {(G02F1/3532 takes precedence)} - G02F 2201/346: distributed (Bragg) reflector - G02F 2203/15: involving resonance effects, e.g. resonantly enhanced interaction - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract Optomechanical device for frequency doubling enhancement are described. The devices include a substrate through which light of a first wavelength is introduced, a first reflector mirror, a conductive layer disposed on the first reflector mirror, and a second mirror spaced apart from the conductive layer, thereby forming an optical cavity between the second mirror and the conductive layer. The devices also include a power source coupled to the second mirror and the conductive layer and a monolayer of non-linear optical material disposed within the optical cavity, the monolayer being configured to produce light of a second wavelength upon interaction with the light of the first wavelength. The second mirror is deformable upon introduction of voltage from the power source and deformation of the second mirror changes a length of the optical cavity, thereby enhancing a power output of the light of the second wavelength produced by the monolayer. ## Claims ### Claim 1 An optomechanical device for frequency doubling enhancement, comprising: a substrate through which light of a first wavelength is introduced; a first reflector mirror positioned on the substrate; a conductive layer disposed on the first reflector mirror; a second mirror spaced apart from the conductive layer, thereby forming an optical cavity between the second mirror and the conductive layer; a power source coupled to the second mirror and the conductive layer; and a monolayer of non-linear optical material disposed within the optical cavity, the monolayer configured to produce light of a second wavelength upon interaction with the light of the first wavelength, wherein the second mirror is deformable upon introduction of voltage from the power source to the second mirror, the voltage introduced to the second mirror effecting deformation of the second mirror; and wherein the deformation of the second mirror changes a length of the optical cavity, thereby enhancing a power output of the light of the second wavelength produced by the monolayer. ### Claim 2 (depends on 1) The device of claim 1, wherein the monolayer comprises molybdenum disulfide (MoS2). ### Claim 3 (depends on 1) The device of claim 1, wherein the second mirror comprises silver. ### Claim 4 (depends on 1) The device of claim 1, wherein the power output of the light of the second wavelength is enhanced by at least 3,000 times upon deformation of the second mirror. ### Claim 5 (depends on 1) The device of claim 1, wherein the first reflector mirror is a dielectric distributed Bragg reflector mirror. ### Claim 6 (depends on 1) The device of claim 1, wherein the conductive layer comprises indium tin oxide (ITO). ### Claim 7 (depends on 1) The device of claim 1, further comprising at least one layer of photoresist disposed between the conductive layer and the second mirror, the layer of photoresist spacing the second mirror from the conductive layer. ### Claim 8 (depends on 7) The device of claim 7, wherein the layer of photoresist comprises SU-8. ### Claim 9 A method for optomechanically enhancing frequency doubled light, comprising: introducing light of a first wavelength through a substrate and through a first reflector mirror; passing the light of the first wavelength through a conductive layer and into an optical cavity formed by a space between the conductive layer and a second deformable mirror, the second deformable mirror being deformable with introduction of a voltage to the second deformable mirror; reflecting the light of the first wavelength in the optical cavity to a monolayer of non-linear optical material disposed within the cavity, thereby producing light of a second wavelength; deforming the second mirror by applying a voltage to the second mirror, thereby effecting deformation of the second mirror so as to change a length of the optical cavity, thereby enhancing a power output of the light of the second wavelength; and outputting the light of the second wavelength. ### Claim 10 (depends on 9) The method of claim 9, wherein the light of the second wavelength is of a frequency that is about double that of a frequency of the light of the first wavelength. ### Claim 11 (depends on 9) The method of claim 9, wherein the monolayer comprises MoS2. ### Claim 12 (depends on 9) The method of claim 9, wherein the second deformable mirror comprises silver. ### Claim 13 (depends on 9) The method of claim 9, wherein the deforming step comprises applying a voltage of about 20 volts to the second mirror. ### Claim 14 (depends on 9) The method of claim 9, wherein the power output of the light of the second wavelength is enhanced by at least 3,000 times.