# US 10,502,988 B2 · Optical modulator module

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- Number: US 10,502,988 B2
- Document ID: US10502988B2
- Status: Granted
- Kind: B2
- Application number: 16/090,500
- Filed: 2017-04-03
- Published: 2019-04-18
- Granted: 2019-12-10
- Earliest claimed: 2016-04-01
- Assignees: Sumitomo Osaka Cement Co., Ltd.
- Applicants: Sumitomo Osaka Cement Co., Ltd
- Inventors: Takatomo Itou; Junichiro Ichikawa
- Web page: https://patentgrep.com/patent/US10502988B2

## CPC

- G02F 1/035: in an optical waveguide structure
- G02F 1/2255: {controlled by a high-frequency electromagnetic component in an electric waveguide structure}
- G02F 2201/06: integrated waveguide
- G02F 2201/12: electrode
- G02F 2203/21: Thermal instability, i.e. DC drift, of an optical modulator; Arrangements or methods for the reduction thereof
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

Provided is an optical modulator module in which an occurrence of an error burst or an increase of an optical loss caused by a vapor phase transportation material can be effectively suppressed. The optical modulator module includes a substrate 1 that has a pyroelectric effect, an optical waveguide 2 that is formed on a principal surface of the substrate 1, a conductive film (not illustrated) that is formed on the substrate 1, and control electrodes (31 to 33) that control a light wave propagated through the optical waveguide 2. In the optical modulator module, the light wave is input to an end portion 21 of the optical waveguide (or is output from the end portion 21 of the optical waveguide) by a space optical system (not illustrated). Adsorption means 4 for adsorbing a vapor phase transportation material is disposed in the vicinity of the end portion 21 of the optical waveguide.

## Claims

### Claim 1

An optical modulator module comprising:
a substrate that has a pyroelectric effect;
an optical waveguide that is formed on a principal surface of the substrate;
a conductive film that is formed on the substrate; and
a control electrode formed on the conductive film that controls a light wave propagated through the optical waveguide, wherein the light wave is input to an end portion of the optical waveguide or is output from the end portion of the optical waveguide by a space optical system, and
an adsorber configured to adsorb a vapor phase transportation material is disposed in a vicinity of the end portion of the optical waveguide.

### Claim 2 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber is disposed on the principal surface of the substrate or a surface facing the principal surface in a case where the substrate is a Z-cut substrate, and is disposed on a side surface of the substrate in contact with the principal surface of the substrate in a case where the substrate is an X-cut substrate.

### Claim 3 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber is a site in which no conductive film is formed.

### Claim 4 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber is a reinforcing member fixed to the substrate.

### Claim 5 (depends on 4)

The optical modulator module according to claim 4, wherein a polarization direction of the reinforcing member and a polarization direction of the substrate are aligned with each other.

### Claim 6 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber is disposed at a position separated from the substrate.

### Claim 7 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber has an area of 1.4 mm2 or greater.

### Claim 8 (depends on 1)

The optical modulator module according to claim 1, wherein the adsorber is formed at a position other than a surface of the substrate having the end portion of the optical waveguide, and wherein the area of the adsorber is equal to or greater than an area of the surface of the substrate having the end portion of the optical waveguide.