# US 10,502,983 B2 · Nanostructured flat lenses for display technologies

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- Number: US 10,502,983 B2
- Document ID: US10502983B2
- Status: Granted
- Kind: B2
- Application number: 16/459,405
- Filed: 2019-07-01
- Published: 2019-10-24
- Granted: 2019-12-10
- Earliest claimed: 2017-06-02
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Robert Jan Visser; Avishek Ghosh
- Web page: https://patentgrep.com/patent/US10502983B2

## CPC

- G02B 5/1809: {with pitch less than or comparable to the wavelength}
- G02B 1/002: {made of materials engineered to provide properties not available in nature, e.g. metamaterials}
- G02B 5/1885: {Arranged as a periodic array}
- G02B 27/0172: {characterised by optical features}
- G02F 1/0009: {Materials therefor}
- G02F 1/0105: {Illuminating devices}
- H10K 59/353: {characterised by the geometrical arrangement of the RGB subpixels}
- H10K 59/879: {comprising refractive means, e.g. lenses}
- G02B 2027/0116: {comprising devices for correcting chromatic aberration}
- G02B 2027/0178: {Eyeglass type (eyeglass details G02C)}
- G02B 2027/0196: {having transparent supporting structure for display mounting, e.g. to a window or a windshield}
- G06T 19/006: {Mixed reality (object pose determination, tracking or camera calibration for mixed reality G06T7/00)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES
- G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL

## Abstract

Embodiments described herein relate to display devices, e.g., virtual and augmented reality displays and applications. In one embodiment, a planar substrate has stepwise features formed thereon and emitter structures formed on each of the features. An encapsulating layer is disposed on the substrate and a plurality of uniform dielectric nanostructures are formed on the encapsulating layer. Virtual images generated by the apparatus disclosed herein provide for improved image clarity by reducing chromatic aberrations at an image plane.

## Claims

### Claim 1

A display apparatus, comprising:
a substrate;
a first pixel formed on the substrate;
a first nanolens disposed on the first pixel;
a second pixel formed on the substrate;
a second nanolens disposed on the second pixel;
a third pixel formed on the substrate; and
a third nanolens disposed on the third pixel, wherein each of the first pixel, the second pixel, and the third pixel has a substantially uniform size and distribution across the substrate.

### Claim 2 (depends on 1)

The apparatus of claim 1, wherein the first pixel is configured to generate light at a first wavelength having a first bandwidth.

### Claim 3 (depends on 2)

The apparatus of claim 2, wherein the first pixel is configured to generate red light.

### Claim 4 (depends on 3)

The apparatus of claim 3, wherein the first nanolens comprises a plurality of first nanostructures.

### Claim 5 (depends on 4)

The apparatus of claim 4, wherein the first nanostructures are adapted to compensate for an optical path length of red light at an image plane.

### Claim 6 (depends on 2)

The apparatus of claim 2, wherein the second pixel is configured to generate light at a second wavelength having a second bandwidth different from the first wavelength and the first bandwidth.

### Claim 7 (depends on 6)

The apparatus of claim 6, wherein the second pixel is configured to generate blue light.

### Claim 8 (depends on 7)

The apparatus of claim 7, wherein the second nanolens comprises a plurality of second nanostructures.

### Claim 9 (depends on 8)

The apparatus of claim 8, wherein the second nanostructures are adapted to compensate for an optical path length of blue light at an image plane.

### Claim 10 (depends on 6)

The apparatus of claim 6, wherein the third pixel is configured to generate light at a third wavelength having a third bandwidth different from the first and second wavelength and the first and second bandwidth.

### Claim 11 (depends on 10)

The apparatus of claim 10, wherein the third pixel is configured to generate green light.

### Claim 12 (depends on 11)

The apparatus of claim 11, wherein the third nanolens comprises a plurality of third nanostructures.

### Claim 13 (depends on 12)

The apparatus of claim 12, wherein the third nanostructures are adapted to compensate for an optical path length of green light at an image plane.

### Claim 14

A display apparatus, comprising:
a substrate;
a red light pixel formed on the substrate;
a first nanolens disposed on the red light pixel;
a blue light pixel formed on the substrate;
a second nanolens disposed on the blue light pixel;
a green light pixel formed on the substrate; and
a third nanolens disposed on the green light pixel, wherein each of the red light pixel, the blue light pixel, and the green light pixel have a unique size and uniform distribution across the substrate.

### Claim 15 (depends on 14)

The apparatus of claim 14, wherein each of the red light pixel, the blue light pixel, and the green light pixel are quadrilateral shaped.

### Claim 16 (depends on 15)

The apparatus of claim 15, wherein each of the first nanolens, the second nanolens, and the third nanolens are sized and shaped to substantially correspond with the size and shape of the red light pixel, the blue light pixel, and the green light pixel, respectively.

### Claim 17 (depends on 14)

The apparatus of claim 14, wherein each of the red light pixel, the blue light pixel, and the green light pixel are circular or oblong shaped.

### Claim 18 (depends on 17)

The apparatus of claim 17, wherein each of the first nanolens, the second nanolens, and the third nanolens are sized and shaped to substantially correspond with the size and shape of the red light pixel, the blue light pixel, and the green light pixel, respectively.

### Claim 19

A display apparatus, comprising:
a substrate;
a first pixel formed on the substrate;
a first nanolens disposed on the first pixel, the first nanolens comprising first dielectric nanostructures adapted to compensate for an optical path length of red light at an image plane;
a second pixel formed on the substrate;
a second nanolens disposed on the second pixel, the second nanolens comprising second dielectric nanostructures adapted to compensate for an optical path length of blue light at the image plane;
a third pixel formed on the substrate; and
a third nanolens disposed on the third pixel, the third nanolens comprising third dielectric nanostructure adapted to compensate for an optical path length of green light at the image plane.

### Claim 20 (depends on 19)

The apparatus of claim 19, wherein each of the first, second, and third dielectric nanostructures reduce or eliminate chromatic aberrations at the image plane.