# US 10,502,945 B2 · Structured illumination microscope apparatus and an image forming apparatus

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- Number: US 10,502,945 B2
- Document ID: US10502945B2
- Status: Granted
- Kind: B2
- Application number: 14/834,755
- Filed: 2015-08-25
- Published: 2016-03-03
- Granted: 2019-12-10
- Earliest claimed: 2010-04-26
- Assignees: Nikon Corporation; The Regents of the University of California
- Applicants: Nikon Corporation; The Regents of the University of California
- Inventors: Yumiko Ouchi; Hisao Osawa; Mats G. L. Gustafsson; David A. Agard
- Web page: https://patentgrep.com/patent/US10502945B2

## CPC

- G02B 21/367: {providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison}
- G02B 5/3083: {Birefringent or phase retarding elements (G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001)}
- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02B 21/06: Means for illuminating specimens
- G02B 27/58: Optics for apodization or superresolution; Optical synthetic aperture systems
- H04N 7/18: Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
- G02B 21/361: {Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups)}
- G02B 27/1066: {for enhancing image performance, like resolution, pixel numbers, dual magnifications or dynamic range, by tiling, slicing or overlapping fields of view}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION

## Abstract

Polarized light which is emitted from an optical fiber becomes circular polarized light by passing through a first quarter wave plate. The circular polarized light which has entered a second quarter wave plate is converted into nearly linear polarized light which has S polarization. P polarization components are removed from the nearly linear polarized light by a polarizer, but the polarizer is not always necessary. The optical axis of the polarizer is set to be a direction which allows transmitting of S polarized light. The light that has passed through the polarizer is separated into diffracted lights by a diffraction grating, and is used as the structured illumination light.

## Claims

### Claim 1

A structured illumination microscope system comprising:
a beam splitter that splits a beam from a light source into a plurality of beams, the beam splitter being a diffraction grating;
a beam selector that rotates to select a first plurality of beams or a second plurality of beams from the plurality of beams;
a first quarter wave plate configured to be rotatable;
a second quarter wave plate disposed between the light source and the first quarter wave plate; and
an objective lens configured to generate an interference fringe pattern on a sample by the first plurality of beams or the second plurality of beams selected by the beam selector, wherein
a fast axis of the first quarter wave plate is rotated to be set at a first position when the first plurality of beams are selected, and
the fast axis of the first quarter wave plate is rotated to be set at a second position that is different from the first position when the second plurality of beams are selected.

### Claim 2 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
at least one of the first plurality of beams is different from the second plurality of beams.

### Claim 3 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
the first plurality of beams are aligned in a first direction, and
the second plurality of beams are aligned in a second direction.

### Claim 4 (depends on 1)

The structured illumination microscope system according to claim 1, further comprising:
a control unit that sets the fast axis of the first quarter wave plate.

### Claim 5 (depends on 1)

The structured illumination microscope system according to claim 1, further comprising:
a control unit that rotates the beam selector and the first quarter wave plate.

### Claim 6 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
the first quarter wave plate is disposed between the beam splitter and the beam selector, and
the second quarter wave plate is disposed between the light source and the beam splitter.

### Claim 7 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
the first quarter wave plate is configured to be rotatable around an axis extending through a center of the first quarter wave plate.

### Claim 8 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
a direction of a fast axis of the second quarter wave plate is ±45°±5.7° with respect to a polarization direction of incoming illumination light.

### Claim 9 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
a direction of the fast axis of the first quarter wave plate is −45°±5.7° with respect to a ruling direction of the beam splitter.

### Claim 10 (depends on 1)

The structured illumination microscope system according to claim 1, further comprising:
a polarizer.

### Claim 11 (depends on 10)

The structured illumination microscope system according to claim 10, wherein
the polarizer is disposed after the first quarter wave plate.

### Claim 12 (depends on 10)

The structured illumination microscope system according to claim 10, further comprising:
a control unit that sets a transmission polarization direction of the polarizer.

### Claim 13 (depends on 10)

The structured illumination microscope system according to claim 10, further comprising:
a control unit that rotates the polarizer.

### Claim 14 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
a phase difference between an ordinary beam and an extraordinary beam after passing through the first quarter wave plate and a phase difference between the ordinary beam and the extraordinary beam after passing through the second quarter wave plate are within 90°±5°, respectively.

### Claim 15 (depends on 1)

The structured illumination microscope system according to claim 1, wherein
the relationship of 0.20ϕ1×sin (6θ1)≤ϕ2≤0.30ϕ1×sin(6θ1) is established, where θ1 is a first structured illumination direction, ϕ1 is a difference of a phase difference generated by the second quarter wave plate from 90° (quarter wave), and ϕ2 is a difference of a phase difference generated by the first quarter wave plate from 90° (quarter wave).

### Claim 16

A structured illumination microscope system comprising:
a beam splitter that splits a beam from a light source into a plurality of beams;
a beam selector that selects a first plurality of beams or a second plurality of beams from the plurality of beams;
a first quarter wave plate configured to be rotatable;
a second quarter wave plate disposed between the light source and the first quarter wave plate; and
an objective lens, wherein
an interference fringe pattern is formed on a sample,
a fast axis of the first quarter wave plate is rotated to be set at a first position when the first plurality of beams are selected,
the fast axis of the first quarter wave plate is rotated to be set at a second position that is different from the first position when the second plurality of beams are selected, and
the relationship of 0.20ϕ1×sin (6θ1)≤ϕ2≤0.30ϕ1×sin (6θ1) is established, where θ1 is a first structured illumination direction, ϕ1 is a difference of a phase difference generated by the second quarter wave plate from 90° (quarter wave), and ϕ2 is a difference of a phase difference generated by the first quarter wave plate from 90° (quarter wave).
