# US 10,502,758 B2 · Inertia sensor and method of manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,502,758 B2 - Document ID: US10502758B2 - Status: Granted - Kind: B2 - Application number: 15/554,264 - Filed: 2016-11-09 - Published: 2018-08-23 - Granted: 2019-12-10 - Earliest claimed: 2016-03-18 - Assignees: Hitachi, Ltd. - Applicants: Hitachi, Ltd. - Inventors: Takashi Shiota; Tatsuyuki Saito; Tatemi Ido; Noriyuki Sakuma; Yuudai Kamada; Atsushi Isobe; Chisaki Takubo - Web page: https://patentgrep.com/patent/US10502758B2 ## CPC - G01P 15/125: by capacitive pick-up - B81B 3/00: Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes (B81B5/00 takes precedence) - B81C 1/00047: {Cavities} - B81C 1/00198: {comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements} - B81C 3/00: Assembling of devices or systems from individually processed components - G01P 15/0802: {Details} - B81B 2201/0235: Accelerometers - G01P 2015/0862: {being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system} - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) ## Abstract Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE1, VE2 and fixed electrodes FE1, FE2, the fixed electrodes are formed by portions surrounded by a through hole TH1 provided in a cap layer CL, and the through hole is filled with an insulating film IF1 and polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IF1 and the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step. ## Claims ### Claim 1 An inertia sensor comprising: a first layer; and a third layer that is disposed over the first layer across a second layer, wherein the first layer has a first concave portion, wherein the second layer has a movable electrode, wherein the third layer has a second concave portion and a fixed electrode, wherein the movable electrode is disposed in a first cavity surrounded by the first concave portion and the second concave portion, wherein the fixed electrode is configured by a portion of the third layer which is surrounded by a through hole provided in the third layer, the through hole being formed between an inner wall surrounding the fixed electrode and an outer wall spaced from the inner wall and surrounding the inner wall, wherein the through hole has a portion in which the outer wall is spaced from the inner wall by a greater width to form a wide portion, wherein the inner wall and the outer wall of the through hole are covered with a first film, the first film covering the inner wall has a first film inner wall and the first film covering the outer wall has a first film outer wall, the first film outer wall being spaced from the first film inner wall by a first film space, and wherein the first film inner wall and the first film outer wall are covered by a second film so as to fill the first film space between the first film inner wall and the first film outer wall except in the wide portion where a gap is left open between the second film covering the first film inner wall and the second film covering the first film outer wall at the wide portion. ### Claim 2 (depends on 1) The inertia sensor according to claim 1, wherein the second film is disposed over the third layer, and the inertia sensor further comprises a wire that is formed over the second film. ### Claim 3 (depends on 1) The inertia sensor according to claim 1, further comprising: a third film that is formed over the second film in the gap and formed over the third layer, and a wire that is formed over the third film. ### Claim 4 (depends on 1) The inertia sensor according to claim 1, further comprising a plurality of openings that are provided in the movable electrode. ### Claim 5 An inertia sensor, comprising: a first layer; and a third layer that is disposed over the first layer across a second layer, wherein the first layer has a first concave portion, a second concave portion, and a first convex portion between the first concave portion and the second concave portion, wherein the second layer has a first movable electrode, a second movable electrode, and a fixed portion between the first movable electrode and the second movable electrode, wherein the third layer has a third concave portion, a fourth concave portion, a second convex portion between the third concave portion and the fourth concave portion, a first fixed electrode, and a second fixed electrode, wherein the first movable electrode is disposed in a first cavity that is surrounded by the first concave portion and the third concave portion, wherein the second movable electrode is disposed in a second cavity that is surrounded by the second concave portion and the fourth concave portion, wherein the first fixed electrode is configured by a first portion of the third layer which is surrounded by a first through hole provided in the third layer, the first through hole being formed between a first inner wall surrounding the first fixed electrode and a first outer wall spaced from the first inner wall and surrounding the first inner wall, wherein the second fixed electrode is configured by a second portion of the third layer which is surrounded by a second through hole provided in the third layer, the second through hole being formed between a second inner wall surrounding the second fixed electrode and a second outer wall spaced from the second inner wall and surrounding the second inner wall, wherein at least one of (i) the first through hole has a portion in which the first outer wall is spaced from the first inner wall by a greater width to form a first wide portion or (ii) the second through hole has a portion in which the second outer wall is spaced from the second inner wall by another greater width to form a second wide portion, so as to form at least one wide portion, wherein the first inner wall and the first outer wall of the first through hole are covered with a first film, the first film covering the first inner wall has a first-film first-through-hole inner wall and the first film covering the first outer wall has a first-film first-through-hole outer wall, the first-film first-through-hole outer wall being spaced from the first-film first-through-hole inner wall by a first-film first-through-hole space, wherein the second inner wall and the second outer wall of the second through hole are covered with the first film, the first film covering the second inner wall has a first-film second-through-hole inner wall and the first film covering the second outer wall has a first-film second-through-hole outer wall, the first-film second-through-hole outer wall being spaced from the first-film second-through-hole inner wall by a first-film second-through-hole space, and wherein the first-film first-through-hole inner wall, the first-film first-through-hole outer wall, the first-film second-through-hole inner wall, and the first-film second-through-hole outer wall are covered by a second film, so as to fill (i) the first-film first-through-hole space between the first-film first-through-hole inner wall and the first-film first-through-hole outer wall and (ii) first-film second-through-hole space between the first-film second-through-hole inner wall and the first-film second-through-hole outer wall, except in the at least one wide portion where at least one gap is left open between the second film covering at least one of (i) the first-film first-through-hole inner wall and the second film covering the first-film first-through-hole outer wall at the first wide portion or (ii) the first-film second-through-hole inner wall and the second film covering the first-film second-through-hole outer wall at the second wide portion. ### Claim 6 (depends on 5) The inertia sensor according to claim 5, wherein the second film is disposed over the third layer, and the inertia sensor further comprises a wire that is formed over the second film. ### Claim 7 (depends on 5) The inertia sensor according to claim 5, further comprising: a third film that is formed on the second film in the at least one gap and formed over the third layer; and a wire that is formed on the third film. ### Claim 8 (depends on 5) The inertia sensor according to claim 5, wherein a plurality of openings are provided in at least one of the first movable electrode and the second movable electrode. ### Claim 9 (depends on 5) The inertia sensor according to claim 5, wherein the first movable electrode and the second movable electrode are different in mass from each other. ### Claim 10 (depends on 1) The inertia sensor according to claim 1, wherein the first film comprises an insulating film. ### Claim 11 (depends on 10) The inertia sensor according to claim 10, wherein the second film comprises a conductive film. ### Claim 12 (depends on 1) The inertia sensor according to claim 1, wherein the gap is a through gap extending through a length of the through hole. ### Claim 13 (depends on 3) The inertia sensor according to claim 3, wherein the third film comprises an insulating film. ### Claim 14 (depends on 13) The inertia sensor according to claim 13, wherein the wire is connected to the third layer by a conductive connection portion extending through the third film. ### Claim 15 (depends on 4) The inertia sensor according to claim 4, wherein the openings in the movable electrode are oriented in a direction between the first layer and the third layer. ### Claim 16 (depends on 5) The inertia sensor according to claim 5, wherein the first film comprises an insulating film. ### Claim 17 (depends on 16) The inertia sensor according to claim 16, wherein the second film comprises a conductive film. ### Claim 18 (depends on 5) The inertia sensor according to claim 5, wherein the at least one gap is a through gap extending through a length of at least one of the first through hole or the second through hole. ### Claim 19 (depends on 7) The inertia sensor according to claim 7, wherein the third film comprises an insulating film. ### Claim 20 (depends on 19) The inertia sensor according to claim 19, wherein the wire is connected to the third layer by a conductive connection portion extending through the third film.