# US 10,502,756 B2 · Flexible microfluidic motion sensors > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,502,756 B2 - Document ID: US10502756B2 - Status: Granted - Kind: B2 - Application number: 15/686,387 - Filed: 2017-08-25 - Published: 2018-03-01 - Granted: 2019-12-10 - Earliest claimed: 2016-08-26 - Assignees: Robert Bosch GmbH - Applicants: Robert Bosch GmbH - Inventors: Seow Yuen Yee; Ashwin Samarao - Web page: https://patentgrep.com/patent/US10502756B2 ## CPC - G01P 15/006: {by making use of fluid seismic masses} - A61B 5/1126: {using a particular sensing technique} - B01L 3/502715: {characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces} - B01L 3/502784: {specially adapted for droplet or plug flow, e.g. digital microfluidics} - B01L 3/505: {Flexible containers without fluid transport within} - G01C 9/06: Electric or photoelectric indication or reading means - G01C 9/24: in closed containers partially filled with liquid so as to leave a gas bubble - G01C 19/58: Turn-sensitive devices without moving masses - G01N 27/07: Construction of measuring vessels; Electrodes therefor - G01P 13/00: Indicating or recording presence, absence, or direction, of movement (electric switches H01H; counting moving objects G06M7/00) - A61B 2562/028: Microscale sensors, e.g. electromechanical sensors [MEMS] - A61B 2562/168: Fluid filled sensor housings - B01L 2200/0673: Handling of plugs of fluid surrounded by immiscible fluid - B01L 2300/0645: Electrodes - B01L 2300/0663: Whole sensors - B01L 2300/0672: Integrated piercing tool - G01C 2009/107: {spheres} - G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G}) - A61B: DIAGNOSIS; SURGERY; IDENTIFICATION (usefulness limited to only animals A61D) - B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE - G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A flexible electronic device includes a flexible electronic circuit and a flexible microfluidic sensor homogeneously integrated into the flexible circuit. The flexible sensor includes a flexible microfluidic structure, a first material, a second material, and an electrode arrangement. At least one of the first and second materials is a fluid. The structure defines at least one microfluidic chamber. The first and second materials are disposed in the chamber. The second material has a physical property and an electrical property different from the first material. The electrode arrangement includes at least one pair of electrodes spaced apart from each other with at least a portion of the at least one chamber located functionally directly therebetween such that at least one electronic property measured across the pair is based on a relationship between the second material and the electrode pair. The relationship is based on a physical condition of the microfluidic structure. ## Claims ### Claim 1 A flexible microfluidic sensor, comprising: a flexible microfluidic structure that defines at least one microfluidic chamber; a first material and a second material disposed in the at least one chamber, the second material having at least one physical property that is different than a physical property of the first material, and the second material having at least one electronic property that is different than an electronic property of the first material; and an electrode arrangement including at least one pair of electrodes that are spaced apart from each other with at least a portion of the at least one chamber located functionally directly between the electrodes such that at least one electronic property measured across the at least one pair of electrodes is based on a relationship between the second material and the at least one pair of electrodes; wherein the relationship between the second material and the at least one pair of electrodes is based on a physical condition of the microfluidic structure. ### Claim 2 (depends on 1) The sensor of claim 1, wherein: the physical condition of the microfluidic structure includes at least one of the group consisting of an orientation of the microfluidic structure, an acceleration of the microfluidic structure, and a rotation rate of the microfluidic structure. ### Claim 3 (depends on 1) The sensor of claim 1, wherein: the first material is a first fluid; and the second material is a second fluid, a solid, or a solid shell that includes a second fluid. ### Claim 4 (depends on 1) The sensor of claim 1, wherein the at least one physical property includes at least one of the group consisting of density and viscosity. ### Claim 5 (depends on 4) The sensor of claim 4, wherein the at least one electrical property measured across the at least one pair of electrodes includes at least one of the group consisting of resistance and capacitance. ### Claim 6 (depends on 1) The sensor of claim 1, wherein: the at least one chamber includes a first microfluidic channel that extends along a first axis; the first material is a first fluid; the second material is a second fluid forms a first bubble within the first fluid in the first microfluidic channel; the at least one pair of electrodes includes a first set of electrode pairs distributed along the first axis of the first microfluidic channel such that at least one electronic property measured across the first set of electrode pairs is based on a relationship between the first bubble and the first set of electrode pairs; and the relationship between the first bubble and the first set of electrode pairs is based on at least one of the group consisting of an orientation of the first axis relative to a direction of gravity, an acceleration of the microfluidic structure along the first axis, and a rotation of the microfluidic structure perpendicular to the first axis. ### Claim 7 (depends on 6) The sensor of claim 6, wherein the relationship between the first bubble and the first set of electrode pairs includes at least one of the group consisting of a location of the first bubble along the first axis and a diameter of the first bubble. ### Claim 8 (depends on 7) The sensor of claim 7, wherein each electrode in the first set of electrode pairs includes a respective electrical contact. ### Claim 9 (depends on 8) The sensor of claim 8, further comprising: a measurement device electrically connected to the electrical contacts of the electrodes in the first set of electrode pairs, the measurement device configured to: determine the relationship between the first bubble and the first set of electrode pairs based on the at least one electrical property measured across the first set of electrode pairs distributed along the first axis; and determine, based on the determined relationship, a physical condition of the microfluidic structure. ### Claim 10 (depends on 9) The sensor of claim 9, wherein: each electrode pair in the first set of electrode pairs has a respective resistive load so that the resistive load of the first set of electrode pairs varies along the first axis; the at least one electrical property measured across the first set of electrode pairs includes resistance, such that a total resistance of the first set of electrode pairs changes based on the location of the first bubble along the first microfluidic channel; and the measurement device is further configured to determine the location of the first bubble along the first microfluidic channel based on the total resistance of the first set of electrode pairs. ### Claim 11 (depends on 7) The sensor of claim 7, wherein: the at least one chamber further includes a second microfluidic channel that extends along a second axis extending perpendicularly to the first axis; the second fluid forms a second bubble within the first fluid in the second microfluidic channel; the at least one pair of electrodes further includes a second set of electrode pairs distributed along the second axis of the second microfluidic channel such that at least one electronic property measured across the second set of electrode pairs is based on a relationship between the second bubble and the second set of electrode pairs; the relationship between the second bubble and the second set of electrode pairs is based on at least one of the group consisting of an orientation of the second axis relative to the direction of gravity, an acceleration of the microfluidic structure along the second axis, and a rotation of the microfluidic structure perpendicular to the second axis. ### Claim 12 (depends on 11) The sensor of claim 11, wherein: the at least one chamber further includes a third microfluidic channel that extends along a third axis extending perpendicularly to the first axis and perpendicularly to the second axis; the second fluid forms a third bubble within the first fluid in the third microfluidic channel; the at least one pair of electrodes further includes a third set of electrode pairs distributed along the third axis of the second microfluidic channel such that at least one electronic property measured across the third set of electrode pairs is based on a relationship between the third bubble and the third set of electrode pairs; the relationship between the third bubble and the third set of electrode pairs is based on at least one of the group consisting of an orientation of the third axis relative to the direction of gravity, an acceleration of the microfluidic structure along the third axis, and a rotation of the microfluidic structure perpendicular to the third axis. ### Claim 13 (depends on 1) The sensor of claim 1, wherein: the at least one chamber includes a microfluidic cavity that extends along a first axis and along a second axis perpendicular to the first axis: the first material is a first fluid; the second material is a second fluid that forms a bubble within the first fluid in the microfluidic cavity; the at least one electronic property measured across the at least one pair of electrodes is based on a relationship between the bubble and the at least one pair of electrodes; and the physical condition of the microfluidic structure includes at least one of the group consisting of: an acceleration of the microfluidic structure along the first axis; an acceleration of the microfluidic structure along the second axis; an orientation of the second axis relative to a direction of gravity; an orientation of the first axis relative to the direction of gravity; and a rotation of the microfluidic structure about a third axis perpendicular to the first axis and the second axis. ### Claim 14 (depends on 1) The sensor of claim 1, wherein the microfluidic structure consists of flexible polymer material. ### Claim 15 (depends on 14) The sensor of claim 14, wherein the flexible polymer material includes at least one of the group consisting of poly-dimethyle-siloxane and poly(p-xylylene). ### Claim 16 A flexible microfluidic sensor, comprising: a flexible microfluidic structure that defines at least one microfluidic chamber; a first material and a second material disposed in the at least one chamber, the second material having at least one physical property that is different than a physical property of the first material, and the second material having at least one electronic property that is different than an electronic property of the first material; and an electrode arrangement including at least one pair of electrodes that are spaced apart from each other with at least a portion of the at least one chamber located functionally directly between the electrodes such that at least one electronic property measured across the at least one pair of electrodes is based on a relationship between the second material and the at least one pair of electrodes; wherein: the relationship between the second material and the at least one pair of electrodes is based on a physical condition of the microfluidic structure; the at least one chamber includes a microfluidic cavity that extends along a first axis and along a second axis perpendicular to the first axis: the first material is a first fluid; the second material is a second fluid that forms a bubble within the first fluid in the microfluidic cavity; the at least one electronic property measured across the at least one pair of electrodes is based on a relationship between the bubble and the at least one pair of electrodes; and the physical condition of the microfluidic structure includes at least one of the group consisting of: an acceleration of the microfluidic structure along the first axis; an acceleration of the microfluidic structure along the second axis; an orientation of the second axis relative to a direction of gravity; an orientation of the first axis relative to the direction of gravity; and a rotation of the microfluidic structure about a third axis perpendicular to the first axis and the second axis; the microfluidic cavity has a first diameter, and is configured to flex due to rotation of the microfluidic structure about the third axis such that the first diameter increases; and the bubble has a second diameter that is based on the first diameter, such that the second diameter is based on the rotation of the microfluidic structure about the third axis. ### Claim 17 (depends on 16) The sensor of claim 16, wherein: the at least one electronic property measured across the at least one pair of electrodes includes capacitance; and the at least one electronic property of the second fluid includes dielectric permittivity such that the capacitance measured across at least one electrode pair changes based on the second diameter of the at least one bubble. ### Claim 18 (depends on 17) The sensor of claim 17, further comprising: a measurement device electrically connected to the at least one electrode pair and configured to determine the rotation rate of the microfluidic structure based on the capacitance measured across the at least one electrode pair. ### Claim 19 A flexible electronic device, comprising: at least one flexible electronic circuit; and a flexible microfluidic sensor homogeneously integrated with the at least one flexible electronic circuit, the flexible microfluidic sensor including: a flexible microfluidic structure that defines at least one microfluidic chamber; a first material and a second material disposed in the at least one chamber, the second material having at least one physical property that is different than a physical property of the first material, the second material having at least one electronic property that is different than an electronic property of the first material, and at least one of the group consisting of the first material and the second material being a fluid; and an electrode arrangement including at least one pair of electrodes that are spaced apart from each other with at least a portion of the at least one chamber located functionally directly between the electrodes such that at least one electronic property measured across the at least one pair of electrodes is based on a relationship between the second material and the at least one pair of electrodes; wherein the relationship between the second material and the at least one pair of electrodes is based on a physical condition of the microfluidic structure. ### Claim 20 (depends on 19) The device of claim 19, wherein the physical condition of the microfluidic structure is indicative of at least one of the group consisting of an orientation, an acceleration, and a rotation rate of at least a portion of a human user.