# US 10,502,563 B2 · Measurement device

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- Number: US 10,502,563 B2
- Document ID: US10502563B2
- Status: Granted
- Kind: B2
- Application number: 15/952,655
- Filed: 2018-04-13
- Published: 2018-11-15
- Granted: 2019-12-10
- Earliest claimed: 2017-05-10
- Assignees: Fanuc Corporation
- Applicants: Fanuc Corporation
- Inventors: Shunpei Tanaka; Kazunori Iijima
- Web page: https://patentgrep.com/patent/US10502563B2

## CPC

- G01B 17/08: for measuring roughness or irregularity of surfaces
- G01B 17/06: for measuring contours or curvatures
- G01S 7/521: Constructional features
- G01S 7/539: using analysis of echo signal for target characterisation; Target signature; Target cross-section
- G01S 15/88: Sonar systems specially adapted for specific applications (seismic or acoustic prospecting or detecting G01V1/00)
- G01S 15/003: {Bistatic sonar systems; Multistatic sonar systems}
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES

## Abstract

A measurement device comprises: an ultrasonic vibrator that emits an ultrasonic wave to a measurement target; an acoustic lens; a sound-receiving element unit; an A/D converter array; a calculator connected to the A/D converter array; and a driving mechanism that makes the measurement target movable or tiltable relative to the ultrasonic vibrator. The calculator stores information in chronological order acquired by the sound-receiving element unit through scanning irradiation with the ultrasonic wave, converts the information stored in chronological order to space information, and acquires an acoustic intensity distribution.

## Claims

### Claim 1

A measurement device that measures a target to be machined by a machine tool as a measurement target, comprising:
an ultrasonic vibrator that emits an ultrasonic wave to the measurement target, which is reflected and/or diffracted from the measurement target,
an acoustic lens that focuses the reflected and/or diffracted wave,
a sound-receiving element unit that converts the ultrasonic wave focused by the acoustic lens to an analog electrical signal;
an A/D converter unit that converts the analog signal from the sound-receiving element unit to a digital signal;
a calculator connected to the A/D converter unit;
a numerical controller that gives a command about a machining shape; and
a driving mechanism that makes the ultrasonic vibrator, the acoustic lens, and the sound-receiving element unit move and tilt relative to the measurement target in response to the machining shape acquired from the numerical controller, wherein
the calculator stores information in chronological order acquired by the sound-receiving element unit through scanning irradiation with the ultrasonic wave, converts the information stored in chronological order to space information, and acquires an acoustic intensity distribution.

### Claim 2 (depends on 1)

The measurement device according to claim 1, wherein the calculator is capable of calculating the geometric dimensions and surface roughness of a fine structure based on the acquired acoustic intensity distribution.

### Claim 3 (depends on 1)

The measurement device according to claim 1, wherein the calculator is capable of displaying the acquired spatial acoustic intensity distribution while overlapping the spatial acoustic intensity distribution with the machining shape.