# US 10,502,508 B2 · System including temperature-controllable stage, semiconductor manufacturing equipment and stage temperature control method

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,502,508 B2
- Document ID: US10502508B2
- Status: Granted
- Kind: B2
- Application number: 14/751,179
- Filed: 2015-06-26
- Published: 2015-12-31
- Granted: 2019-12-10
- Earliest claimed: 2014-06-27
- Assignees: Tokyo Electron Limited
- Applicants: Tokyo Electron Limited
- Inventors: Tsutomu Hiroki
- Web page: https://patentgrep.com/patent/US10502508B2

## CPC

- F28F 27/02: for controlling the distribution of heat-exchange media between different channels ({static flow control means in header boxes F28F9/026}; arrangements of guide plates or guide vanes F28F9/22, F28F25/12)
- F28F 13/06: by affecting the pattern of flow of the heat-exchange media {(F28F13/003 takes precedence; static flow control means in header boxes F28F9/026)}
- H01J 37/32724: {Temperature}
- H10P 72/0432: {mainly by conduction}
- H10P 72/0434: {mainly by convection}
- H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support}
- F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

There is provided a system including a temperature-controllable stage, which includes: a disc-shaped plate having a front surface on which a substrate is mounted and a rear surface; a heat exchanger configured to individually supply a heat exchange medium to a plurality of regions two-dimensionally arranged to face the rear surface of the plate and configured to individually recover the heat exchange medium supplied to the regions, the plurality of regions being obtained by dividing a plurality of zones defined to face the rear surface of the plate in the heat exchanger; and a plurality of valve units configured to control, for each of the plurality of zones, the supply or cutoff of the heat exchange medium to the plurality of regions by the heat exchanger.

## Claims

### Claim 1

A system including a temperature-controllable stage, comprising:
a disc-shaped plate having a front surface on which a substrate is mounted and a rear surface;
a heat exchanger configured to individually supply a heat exchange medium to a plurality of regions two-dimensionally arranged to face the rear surface of the disc-shaped plate and configured to individually recover the heat exchange medium supplied to the regions, the plurality of regions in the heat exchanger being obtained by dividing a plurality of zones defined to face the rear surface of the disc-shaped plate;
a plurality of valve units configured to supply or cutoff, for each of the plurality of zones, the heat exchange medium to the plurality of regions;
a cooler configured to cool down the heat exchange medium recovered from the heat exchanger via the plurality of valve units and supply the cooled-down heat exchange medium to the heat exchanger via the plurality of valve units;
a heater configured to heat the heat exchange medium recovered from the heat exchanger via the plurality of valve units and supply the heated heat exchange medium to the heat exchanger via the plurality of valve units; and
a controller that performs a control to allow the plurality of valve units to individually switch a flow state of the heat exchange medium to one of a first flow state in which the heat exchange medium is supplied from the cooler to the heat exchanger, a second flow state in which the heat exchange medium is supplied from the heater to the heat exchanger, and a third flow state in which supply of the heat exchange medium from the cooler and the heater to the heat exchanger is cut off and the heat exchange medium remaining in the heat exchanger circulates between the plurality of valve units and the heat exchanger,
wherein the heat exchanger includes:
a plurality of first pipes two-dimensionally arranged below the disc-shaped plate, the first pipes extending upward toward the rear surface of the disc-shaped plate and having opened ends respectively facing the regions;
a plurality of partition walls configured to define a plurality of spaces respectively surrounding the first pipes; and
a plurality of second pipes connected to the plurality of partition walls so as to respectively communicate with the respective spaces,
wherein the plurality of spaces is defined by the plurality of partition walls so as to have the heat exchange medium, which is ejected from the respective opened ends of the plurality of first pipes toward the rear surface of the disc-shaped plate, individually recovered into corresponding ones of the plurality of spaces respectively surrounding the plurality of first pipes,
wherein each of the valve units includes:
a common line having a first end connected to the first pipes that provides the opened ends in the same zone, and a second end;
a first line and a second line which are connected to the second end of the common line;
a first heat exchange medium supply line connected to the cooler;
a second heat exchange medium supply line connected to the heater;
a first recovery line connected to the cooler;
a second recovery line connected to the heater;
a first valve which is a three-way valve having a first port connected to the first heat exchange medium supply line, a second port connected to the first recovery line, and a third port connected to the first line;
a second valve which is a three-way valve having a first port connected to the second heat exchange medium supply line, a second port connected to the second recovery line, and a third port connected to the second line;
a first bypass line having a first end connected to the first recovery line via a third valve, and a second end connected to the second recovery line via a fourth valve;
a return line having a first end connected to the second pipes that communicate with the spaces in the same zone, and a second end connected to the first bypass line at a position between the third valve and the fourth valve; and
a second bypass line having a first end connected to a point in a middle of the return line, and a second end connected to a point in a middle of the common line, and
wherein the first valve and the second valve are capable of being opened and closed independently of each other, and the third valve and the fourth valve are capable of being opened and closed independently of each other.

### Claim 2 (depends on 1)

The system of claim 1, wherein the cooler is configured to supply the heat exchange medium adjusted to a first temperature, and
the heater is configured to supply the heat exchange medium adjusted to a second temperature higher than the first temperature.

### Claim 3 (depends on 2)

The system of claim 2, wherein each of the valve units is configured to supply the heat exchange medium adjusted to the first temperature and the heat exchange medium adjusted to the second temperature, to the regions without mixing the heat exchange medium adjusted to the first temperature and the heat exchange medium adjusted to the second temperature.

### Claim 4 (depends on 1)

The system of claim 1, wherein each of the valve units is configured such that, if the first valve remains opened, the second valve is closed and such that, if the second valve remains opened, the first valve is closed.

### Claim 5 (depends on 1)

The system of claim 1, wherein the plurality of zones is bounded by a plurality of concentric circles defined to face the rear surface of the disc-shaped plate, and
the plurality of regions is obtained by dividing the plurality of zones along a circumferential direction of the disc-shaped plate.

### Claim 6 (depends on 1)

The system of claim 1, wherein the heat exchanger is configured to supply the heat exchange medium perpendicularly to the rear surface of the disc-shaped plate.

### Claim 7 (depends on 1)

The system of claim 1, wherein the heat exchanger is mainly composed of resin.

### Claim 8 (depends on 7)

The system of claim 7, wherein the opened ends of the plurality of first pipes are made of carbon-containing resin.

### Claim 9 (depends on 1)

The system of claim 1, wherein a plurality of recess portions into which the opened ends of the plurality of first pipes are respectively inserted is formed in the rear surface of the disc-shaped plate.

### Claim 10 (depends on 1)

The system of claim 1, wherein a flow path interconnecting each of the valve units and the heat exchanger has a length of 2 m or less.

### Claim 11 (depends on 1)

The system of claim 1, wherein the number of the plurality of valve units is n, the number of the plurality of zones is n, the number of the plurality of regions is m, and n is smaller than m (where n and m are integers of 2 or more).

### Claim 12 (depends on 1)

A semiconductor manufacturing equipment provided with the system of claim 1.

### Claim 13 (depends on 1)

The system of claim 1, wherein in the first flow state, the controller performs a control to:
cut off a connection between the first port of the first valve and the second port of the first valve and permit a connection between the first port of the first valve and the third port of the first valve;
cut off a connection between the first port of the second valve and the third port of the second valve and permit a connection between the first port of the second valve and the second port of the second valve;
open the third valve; and
close the fourth valve.

### Claim 14 (depends on 1)

The system of claim 1, wherein in the second flow state, the controller performs a control to:
cut off a connection between the first port of the first valve and the third port of the first valve and permit a connection between the first port of the first valve and the second port of the first valve;
cut off a connection between the first port of the second valve and the second port of the second valve and permit a connection between the first port of the second valve and the third port of the second valve;
close the third valve; and
open the fourth valve.

### Claim 15 (depends on 1)

The system of claim 1, wherein in the third flow state, the controller performs a control to:
cut off a connection between the first port of the first valve and the third port of the first valve and permit a connection between the first port of the first valve and the second port of the first valve;
cut off a connection between the first port of the second valve and the third port of the second valve and permit a connection between the first port of the second valve and the second port of the second valve;
close the third valve; and
close the fourth valve.