# US 10,502,466 B2 · Heat exchanger for cooling a heating tube and method thereof

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- Number: US 10,502,466 B2
- Document ID: US10502466B2
- Status: Granted
- Kind: B2
- Application number: 16/168,672
- Filed: 2018-10-23
- Published: 2019-02-21
- Granted: 2019-12-10
- Earliest claimed: 2018-10-23
- Assignees: Applied Materials, Inc.
- Applicants: Applied Materials, Inc.
- Inventors: Gerd Hoffmann; Peter Skuk
- Web page: https://patentgrep.com/patent/US10502466B2

## CPC

- F25B 39/02: Evaporators
- F28D 7/0008: {the conduits for one medium being in heat conductive contact with the conduits for the other medium}
- F28F 1/00: Tubular elements; Assemblies of tubular elements (specially adapted for movement F28F5/00)
- F28D 2021/0028: {for cooling heat generating elements, e.g. for cooling electronic components or electric devices}
- F28F 13/10: by imparting a pulsating motion to the flow, e.g. by sonic vibration
- F25B: REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general)
- F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16)

## Abstract

An evaporator contains a heating tube, a heat exchanger for cooling the heating tube, and a means for generating an aerosol. The heat exchanger contains at least two cooling pipes, where the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube. The means for generating the aerosol is coupled to the at least two cooling pipes.

## Claims

### Claim 1

An evaporator, comprising:
a heating tube;
a heat exchanger for cooling the heating tube, comprising:
at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube; and
a means for generating an aerosol coupled to the at least two cooling pipes.

### Claim 2 (depends on 1)

The evaporator of claim 1, wherein the means for generating the aerosol comprises:
at least two capillaries; and
a valve.

### Claim 3 (depends on 2)

The evaporator of claim 2, further comprising a conduit between the valve and the at least two capillaries.

### Claim 4 (depends on 1)

The evaporator of claim 1, wherein the means for generating the aerosol comprises at least two valves provided at an inlet side of the at least two cooling pipes.

### Claim 5 (depends on 1)

The evaporator of claim 1, wherein the means for generating the aerosol comprises a vibrating element.

### Claim 6 (depends on 1)

The evaporator of claim 1, further comprising a controller in communication with the means for generating an aerosol, wherein the controller is configured to adjust at least one of a pulse period, a pulse duration, and a pulse delay.

### Claim 7 (depends on 1)

The evaporator of claim 1, wherein the number of cooling pipes is from 2 to 64, the cooling pipe inner diameter is from 12 mm2 to 200 mm2, and the length of each portion of the cooling pipe in contact with the heating tube is from 20 cm to 100 cm.

### Claim 8 (depends on 1)

The evaporator of claim 1, further comprising grooves disposed on the heating tube, the cooling pipes disposed at least partially therein.

### Claim 9 (depends on 1)

The evaporator of claim 1, further comprising:
a controller; and
a temperature sensor for measuring the temperature of the heating tube or the cooling pipes, wherein the temperature sensor is communicatively coupled to the controller.

### Claim 10

An evaporator, comprising:
a heating tube;
electric heating coils for vaporizing material located inside the heating tube;
a heat exchanger for cooling the heating tube, comprising:
at least two cooling pipes, wherein the at least two cooling pipes are arranged such that each of the at least two cooling pipes is in physical contact with the heating tube; and
a means for generating an aerosol coupled to the at least two cooling pipes.

### Claim 11 (depends on 10)

The evaporator of claim 10, wherein the means for generating the aerosol comprises:
at least two capillaries; and
a valve.

### Claim 12 (depends on 11)

The evaporator of claim 11, further comprising a conduit between the valve and the at least two capillaries.

### Claim 13 (depends on 10)

The evaporator of claim 10, wherein the means for generating the aerosol comprises at least two valves provided at an inlet side of the at least two cooling pipes.

### Claim 14 (depends on 10)

The evaporator of claim 10, wherein the means for generating the aerosol comprises a vibrating element.

### Claim 15 (depends on 10)

The evaporator of claim 10, further comprising a controller in communication with the means for generating an aerosol, wherein the controller is configured to adjust at least one of a pulse period, a pulse duration, and a pulse delay.

### Claim 16 (depends on 10)

The evaporator of claim 10, wherein the number of cooling pipes is from 2 to 64.

### Claim 17 (depends on 10)

The evaporator of claim 10, wherein the cooling pipe inner diameter is from 12 mm2 to 200 mm2.

### Claim 18 (depends on 10)

The evaporator of claim 10, wherein the length of each portion of the cooling pipe in contact with the heating tube is from 20 cm to 100 cm.

### Claim 19 (depends on 10)

The evaporator of claim 10, further comprising grooves disposed on the heating tube, the cooling pipes disposed at least partially therein.

### Claim 20 (depends on 10)

The evaporator of claim 10, further comprising:
a controller; and
a temperature sensor for measuring the temperature of the heating tube or the cooling pipes, wherein the temperature sensor is communicatively coupled to the controller.