Valve and fluid control appratus
AssigneeMurata Manufacturing Co., Ltd.
InventorsKenichi Kotani, Takenobu Maeda, Atsuhiko Hirata
Life of this patent
Estimating the term…
Abstract
A valve includes a lower valve housing, a diaphragm, and an upper valve housing. A top surface of a piezoelectric pump is bonded to a bottom surface of the lower valve housing. A circular hole portion is provided in a central portion of a region of the diaphragm that opposes a projecting portion of the lower valve housing. The diaphragm is bonded to the upper valve housing and the lower valve housing, and a divided interior of a valve housing configures a first lower valve chamber, a second lower valve chamber, a first upper valve chamber, and a second upper valve chamber. A groove is located in a wall portion of the upper valve housing that opposes the diaphragm in the first upper valve chamber.
Claims13
A valve comprising:
- a first valve housing including a first opening portion;
- a second valve housing including a second opening portion;
- a diaphragm including a hole portion, the diaphragm defining a first valve chamber with the first valve housing, and a second valve chamber with the second valve housing;
- a first adhesive sheet;
- and
- a second adhesive sheet;
- wherein
- the first valve housing includes a projecting portion that projects toward the diaphragm in the first valve chamber;
- the projecting portion makes contact with a periphery of the hole portion in the diaphragm and covers the hole portion;
- the first valve housing and the diaphragm are bonded to each other by the first adhesive sheet at a periphery of the first valve chamber;
- the diaphragm and the second valve housing are bonded to each other by the second adhesive sheet at a periphery of the second valve chamber;
- a first through-hole is provided in a region of the first adhesive sheet that faces the first valve chamber;
- a second through-hole is provided in a region of the second adhesive sheet that faces the second valve chamber;
- an outer circumference of the first through-hole is greater than an outer circumference of the projecting portion, and is smaller than or equal to an outer circumference of the first valve chamber;
- and
- an outer circumference of the second through-hole is greater than the outer circumference of the projecting portion, and is smaller than or equal to an outer circumference of the second valve chamber.
Dependencies are inferred from the claim text.