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US 10,501,867 B2Granted
Self-aligned tunable metamaterials
OwnerArturo A Ayon, Ramakrishna Kotha +1inventors
InventorsArturo A Ayon, Ramakrishna Kotha, Diana Strickland
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Abstract
A self-aligned tunable metamaterial is formed as a wire mesh. Self-aligned channel grids are formed in layers in a silicon substrate using deep trench formation and a high-temperature anneal. Vertical wells at the channels may also be etched. This may result in a three-dimensional mesh grid of metal and other material. In another embodiment, metallic beads are deposited at each intersection of the mesh grid, the grid is encased in a rigid medium, and the mesh grid is removed to form an artificial nanocrystal.
Claims21
A method of manufacturing a metamaterial comprising:
- etching a two-dimensional horizontal grid pattern into a substantially homogeneous substrate block, the two-dimensional grid pattern and depth of the etch being selected for a desired metamaterial property;
- annealing the substrate to form a plurality of nano-scale channel grids, each channel grid being characterized by the two-dimensional grid pattern and each channel grid being substantially identical to and vertically aligned with each other channel grid;
- and
- depositing a first material in the channel grids to form multiple layers of wire mesh in the substrate block.
1 more element
Dependencies are inferred from the claim text.